PREPARATION OF B-N FILMS BY ION BEAM ASSISTED DEPOSITION
JIANG Hai;TAO Kun;LI Hengde Tsinghua University. Beijing lecturer;Department of Materials Science and Engineering;Tsinghua University; Beijing 100084
Cite this article:
JIANG Hai;TAO Kun;LI Hengde Tsinghua University. Beijing lecturer;Department of Materials Science and Engineering;Tsinghua University; Beijing 100084. PREPARATION OF B-N FILMS BY ION BEAM ASSISTED DEPOSITION. Acta Metall Sin, 1993, 29(4): 77-80.
Abstract BN films, synthesized by ion beam assisted deposition, were analysed by RBS,AES, IR spectra and TEM. Formation of c-BN phase was shown not only by IR spectra atabsorption peak of 1100 cm~(-1), but also by electron diffraction pattern. The results of AESdemonstrate an effect of N~+ implantation near the film surface. The deposited films consist ofthree layers, i.e., ion implantation layer, film layer and mixed intermediate layer, according tothe difference of concentration. The micro-Knoop hardess of the film is 25-35 GPa.
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