偏压对电弧离子镀沉积类金刚石膜的影响

金属学报

2004, Vol. 40

Issue (5): 537-540

论文

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偏压对电弧离子镀沉积类金刚石膜的影响

邹友生; 汪伟;郑静地;孙超;黄荣芳;闻立时

中国科学院金属研究所; 沈阳 110016；中国科学院金属研究所沈阳材料科学国家(联合)实验室; 沈阳 110016

Influence of Bias Voltage on Diamond-Like Carbon Film Deposited by Arc Ion Plating

ZOU Yousheng; WANG Wei; ZHENG Jingdi; SUN Chao;HUANG Rongfang; WEN Lishi

Institute of Metal Research; The Chinese Academy of Sciences; Shenyang 110016；Shenyang National Laboratory for Materials Science; Institute of Metal Research; The Chinese Academy of Sciences; Shenyang 110016

引用本文:

邹友生; 汪伟; 郑静地; 孙超; 黄荣芳; 闻立时 . 偏压对电弧离子镀沉积类金刚石膜的影响[J]. 金属学报, 2004, 40(5): 537-540 .
, , , , , . Influence of Bias Voltage on Diamond-Like Carbon Film Deposited by Arc Ion Plating[J]. Acta Metall Sin, 2004, 40(5): 537-540 .

全文: PDF(2599 KB)

摘要: 采用电弧离子镀方法, 在Si(100)基底上沉积了类金刚石(DLC)膜. 用激光Raman谱和X射线光电子能谱(XPS)对不同偏压下沉积的类金刚石膜的结构进行了分析. 结果表明, Raman谱的 D峰和G峰的强度之比ID/IG 随着脉冲负偏压的增加先减小后增大, sp3键含量随着负偏压的增加先增加后减小. 偏压为-200 V 时, ID/IG 值最小为0.70, sp3键含量最大为26.7%. 纳米压痕仪测量结果表明, 随着脉冲负偏压增加, 硬度和弹性模量先增加后下降. 偏压为-200 V 时, DLC膜的硬度和弹性模量最大, 分别为30.8和250.1 GPa.

关键词 ：类金刚石膜, 电弧离子镀, 脉冲偏压

Abstract：The microstructures of the diamond-like carbon (DLC) films deposited on Si (100) substrate by using arc ion plating (AIP) under different pulse bias voltage were characterized using Raman spectra and X-ray photoelectron spectra (XPS). The results show that the ratio ID/IG decreases and sp3 bond content increases with increasing pulse bias voltage firstly, and then the ratio ID/IG increases and sp3 bond content decreases after the pulse bias voltage exceeding -200 V. The minimal ratio ID/IG is 0.70 and the content of sp3 bond is 26.7% at the bias voltage of -200 V. The hardness and modulus determined by using nanoindentation technique increase and then decrease with increasing pulse bias voltage. The hardness and modulus of the DLC films obtained at bias voltage of -200 V reaches a maximum value of 30.8 and 250.1 GPa, respectively.

Key words： diamond-like carbon film arc ion plating pulse bias voltage

收稿日期: 2003-05-26

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