磁控溅射NbMoTaWReCN高熵陶瓷涂层结构与耐磨耐蚀性能研究

doi:10.11900/0412.1961.2026.00143

金属学报 DOI: 10.11900/0412.1961.2026.00143

刘源¹, 徐锋¹, 周明², 程惠伦², 赵文轩¹, 左敦稳¹

1 南京航空航天大学机电学院南京 210007

2 铜冠优创特种材料有限公司铜陵 244002

STRUCTURE, WEAR RESISTANCE AND CORROSION RESISTANCE OF NbMoTaWReCN HIGH‑ENTROPY CERAMIC COATINGS PREPARED BY MAGNETRON SPUTTERING

LIU Yuan ¹, XU Feng ¹, ZHOU Ming ², CHENG Huilun ², ZHAO Wenxuan ¹, ZUO Dunwen ¹

1 College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics,

Nanjing 210007, China

2 Tongguan Youchuang Special Materials Co. Ltd., Tongling 244002, China

引用本文:

刘源, 徐锋, 周明, 程惠伦, 赵文轩, 左敦稳. 磁控溅射NbMoTaWReCN高熵陶瓷涂层结构与耐磨耐蚀性能研究[J]. 金属学报, DOI: 10.11900/0412.1961.2026.00143.

全文: PDF(4651 KB)

摘要: 针对海洋极端工况下15-5PH不锈钢易发生摩擦-腐蚀协同失效，且传统NbMoTaW基高熵碳氮化物涂层存在粗大柱状晶、致密度不足与本征脆性突出等短板，为开发兼具优异强韧性与耐磨耐蚀协同性能的海洋装备表面防护涂层，采用反应磁控溅射技术制备了NbMoTaWCN与NbMoTaWReCN高熵涂层，系统研究了Re掺杂对涂层微观组织、力学性能、摩擦磨损行为及电化学腐蚀性能的影响规律与调控机制。结果表明，两组涂层均呈单相B1型岩盐结构固溶体。Re原子以置换固溶方式进入晶格，引发剧烈局域晶格畸变并形成高密度位错网络，有效抑制了粗大柱状晶的择优生长，促使组织转变为致密纳米晶结构；含Re涂层的硬度、膜基临界结合载荷及断裂韧性分别提升至22.3 GPa、49.1 N和8.02 MPa·m^1/2。摩擦过程中，含Re涂层表面原位生成富Re-O自润滑氧化层，使稳态摩擦系数降至0.40，磨损率大幅降低至1.34 ´ 10^-7 mm³/(N·m)。电化学结果表明，超细纳米晶结构延长了腐蚀介质的渗透路径，且Re参与构建了高能垒多元复合钝化膜，使自腐蚀电流密度降至4.3 ´ 10^-7 A/cm²，耐海水腐蚀性能优异。

关键词 ：高熵碳氮化物涂层, 铼掺杂, 磁控溅射, 微观结构, 耐磨性能, 耐蚀性能

Abstract：Marine engineering components are exposed to harsh service environments characterized by the synergy of friction and corrosion, which severely compromises their service reliability and shortens their operational lifespan. 15-5PH martensitic precipitation-hardening stainless steel is extensively utilized as a core structural material for deep-sea equipment due to its excellent combination of high strength, good corrosion resistance, and superior machinability. However, its relatively low surface hardness and poor wear resistance make it highly susceptible to accelerated degradation under coupled friction and corrosion conditions, posing significant challenges to the long-term stable operation of marine equipment. High-entropy carbonitride (HECN) coatings have emerged as a promising solution for surface protection owing to their exceptional mechanical properties, high thermal stability, and excellent chemical inertness. Nevertheless, conventional NbMoTaW-based HECN coatings typically exhibit inherent drawbacks such as coarse columnar grain structure, low density, and intrinsic brittleness, which limit their practical application in extreme marine environments. To address these issues, NbMoTaWCN and NbMoTaWReCN high-entropy carbonitride coatings were fabricated on 15-5PH stainless steel substrates via reactive magnetron sputtering. The effects of rhenium (Re) doping on the microstructure, mechanical properties, friction and wear behavior, and electrochemical corrosion performance of the coatings were systematically investigated. The results demonstrate that both coatings possess a single-phase face-centered cubic (FCC) solid solution structure. Re atoms enter the lattice via substitutional solid solution, inducing severe local lattice distortion and forming a high-density dislocation network. This effectively suppresses the preferential growth of coarse columnar grains and promotes the transformation to a dense nanocrystalline structure. Consequently, the hardness, critical adhesion load, and fracture toughness of the Re-doped coating are significantly enhanced to 22.3 GPa, 49.1 N, and 8.02 MPa·m¹/², respectively. During friction, an in-situ formed Re-O-rich self-lubricating oxide layer on the coating surface reduces the steady-state friction coefficient to 0.4 and decreases the wear rate drastically to 1.34×10⁻⁷ mm³/(N·m). Electrochemical tests reveal that the ultrafine nanocrystalline structure prolongs the penetration path of corrosive media, and Re participates in the formation of a high-energy-barrier multicomponent composite passive film, resulting in a low self-corrosion current density of 4.3×10⁻⁷ A/cm² and excellent seawater corrosion resistance. This study provides an effective approach for developing high-performance protective coatings for marine engineering applications.

Key words： High-entropy carbonitride coating Rhenium doping Magnetron sputtering Microstructure Wear resistance Corrosion resistance

收稿日期: 2026-05-27

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