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| Analysis and Calculation of Forces on Macroparticles in Plasma Sheath |
| GUO Huimei; LIN Guoqiang; SHENG Mingyu; WANG Dezhen; DONG Chuang;WEN Lishi |
| State Key Laboratory for Materials Modification by Laser; Ion and Electron beams; Dalian University of Technology; Dalian 116024 |
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Cite this article:
GUO Huimei; LIN Guoqiang; SHENG Mingyu; WANG Dezhen; DONG Chuang; WEN Lishi. Analysis and Calculation of Forces on Macroparticles in Plasma Sheath. Acta Metall Sin, 2004, 40(10): 1064-.
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Abstract Applying the plasma sheath models given by Edlberg and Aydil,
the charging effect and forces acting on macroparticles are
analyzed and calculated in pulsed-bias arc ion plating, which
gives an evidence to the experimental phenomenon and physical
model in which macroparticles would be repulsed from electric
force and hence are significantly reduced.
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Received: 13 November 2003
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