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Acta Metall Sin  2020, Vol. 56 Issue (10): 1386-1392    DOI: 10.11900/0412.1961.2020.00009
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In Situ Study on Liquid-Solid Electromigration Behavior in Cu/Sn-37Pb/Cu Micro-Interconnect
ZHANG Zhijie1, HUANG Mingliang2()
1 School of Materials Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003, China
2 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
Cite this article: 

ZHANG Zhijie, HUANG Mingliang. In Situ Study on Liquid-Solid Electromigration Behavior in Cu/Sn-37Pb/Cu Micro-Interconnect. Acta Metall Sin, 2020, 56(10): 1386-1392.

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Abstract  

Electromigration (EM), which describes the mass transport due to momentum exchange between conducting electrons and diffusing metal atoms under an applied electric field, has become a serious reliability issue in high-density packaging. With the increasing demands for miniaturization, liquid-solid (L-S) EM will pose a critical challenge to the reliability of solder interconnects. In this work, synchrotron radiation real-time imaging technology is used to in situ study the interfacial reaction and atom migration in Cu/Sn-37Pb/Cu solder interconnects undergoing L-S EM at 185 ℃ with a current density of 1.0×104 A/cm2. In the heating stage, Pb atoms directionally migrate from the cathode toward the anode, resulting in the growth of Pb-rich phase at the anode. In the dwelling stage, Pb atoms diffuse backward, then equilibrium phase is obtained. In the cooling stage, Pb atoms directionally migrate from the cathode toward the anode again until the solder solidified, three phases is obtained: the Pb-rich phase, the Sn-Pb phase and the Sn-rich phase. The abnormal migration behavior of Pb atoms in different stages is determined by the combined effect of the chemical potential gradient flux (Jchem) and EM-induced flux (Jem). Jem is determined by the effective charge number (Z*) of Pb atoms, which was calculated to be -3.20 at 185 ℃ based on the growth kinetics of the Pb-rich layer model.

Key words:  synchrotron radiation real-time imaging technology      Sn-37Pb micro-interconnect      liquid-solid electromigration      interfacial reaction      effective charge number     
Received:  07 January 2020     
ZTFLH:  TG115  
Fund: National Natural Science Foundation of China(51801079);National Natural Science Foundation of China(U1837208);National Natural Science Foundation of China(51671046);Natural Science Foundation for Young Scientists of Jiangsu Province(BK20180987)

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https://www.ams.org.cn/EN/10.11900/0412.1961.2020.00009     OR     https://www.ams.org.cn/EN/Y2020/V56/I10/1386

Fig.1  Schematics of the line-type Cu/Sn-37Pb/Cu solder interconnect (a) and line type interconnect used for electromigration (b)
Fig.2  Synchrotron radiation images of the Cu/Sn-37Pb/Cu interconnect during liquid-solid electromigration (L-S EM) under 1.0×104 A/cm2 at 185 ℃ in the heating stage (a), dwelling stage (b) and cooling stage (c)
Fig.3  SEM images of the Cu/Sn-37Pb/Cu interconnects after L-S EM under 1.0×104 A/cm2 at 185 ℃(a) whole interconnect(b) anode interface(c) cathode interface
Fig.4  The growth kinetics of the Pb-rich layer in the Cu/Sn-37Pb/Cu interconnects as a function of L-S EM time
Fig.5  Schematics of the Pb atomic fluxes and the microstructural evolution in Cu/Sn-37Pb/Cu interconnects during L-S EM (JchemPb and JemPb are the Pb atomic fluxes induced by chemical potential gradient and EM, respectively)(a) heating stage (b) dwelling stage (c) cooling stage
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