EVALUATION OF ADHESION AND PLASTICITY OF PVD FILMS

Acta Metall Sin

1992, Vol. 28

Issue (4): 77-82 DOI:

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EVALUATION OF ADHESION AND PLASTICITY OF PVD FILMS

LIU Changqing;JIN Zhujing;YU Li;YU Zhiming;WU Weitao Corrosion Science Laboratory; Institute of Corrsion and Protection of Metals; Academia Sinica; Shenyang

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LIU Changqing;JIN Zhujing;YU Li;YU Zhiming;WU Weitao Corrosion Science Laboratory; Institute of Corrsion and Protection of Metals; Academia Sinica; Shenyang. EVALUATION OF ADHESION AND PLASTICITY OF PVD FILMS. Acta Metall Sin, 1992, 28(4): 77-82.

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Abstract Evaluation of adhesion of PVD Ti and TiN films on A_3 steel was carried out bya newly developed method, so called constant rate pulling test (CRPT) at 0.05mm/min, underSEM observation simultaneously. As the criterion, the critical cracking or spalling elongationof the film/substrate system on the one-sided polishing notched tensile specimen may be de-termined, respectively, to evaluate the plasticity and adherence of the film to substrate. Theconventional scratch test was also made for evaluation of the adhesion of films of the same sys-tems. Both give the coordinate assessment for all of the systems. In addition, the influence ofadhesion of the films to the substrate on ultimate YS of substrate material was discussed andanother criterion for adhesion assessment was proposed.

Key words: PVD film constant rate pulling test scratch test adhesion

Received: 18 April 1992

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