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A NEW METHOD ON EVALUATING THE YIELD STRENGTH OF METAL FILMS USING DEPTH-SENSING INDENTATION INSTRUMENT |
MA Dejun; XU Kewei; HE Jiawen(State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University Xi'an 710049)Corespondent :HE Jiawen; professor Tel: (029)3268696; For: (029)32379910;E-mail: jwheoritu.edu.cn |
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Cite this article:
MA Dejun; XU Kewei; HE Jiawen(State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University Xi'an 710049)Corespondent :HE Jiawen; professor Tel: (029)3268696; For: (029)32379910;E-mail: jwheoritu.edu.cn. A NEW METHOD ON EVALUATING THE YIELD STRENGTH OF METAL FILMS USING DEPTH-SENSING INDENTATION INSTRUMENT. Acta Metall Sin, 1998, 34(6): 661-666.
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Abstract The fiaite element method of elastoplastic large strain was employed to study the indentation erperhoent of thin metal films on silicon substrate combinatioll by a raid spheriod indenter. The relationship between the hardening index of the film and the charactedstic value of load--displaCement curve, and that among the yield strength, hardening indeX, Youness modulus of the film and the m applied load have been established. Co-cub theSe twoforacteristic s and the maxinunn load given by nanoboedtstion test, the hardening index and po strength of the metal oh can be obtained.
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Received: 18 June 1998
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