STUDY OF (Ti,Al)N FILMS DEPOSITED BY DC MAGNETRON SPUTTERING

Acta Metall Sin

1994, Vol. 30

Issue (17): 233-237 DOI:

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STUDY OF (Ti,Al)N FILMS DEPOSITED BY DC MAGNETRON SPUTTERING

JIANG Shengrui; PENG Dongliang; ZHAO Xueying; XIE Liang; LI Qiang(Lanzhou University)

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JIANG Shengrui; PENG Dongliang; ZHAO Xueying; XIE Liang; LI Qiang(Lanzhou University). STUDY OF (Ti,Al)N FILMS DEPOSITED BY DC MAGNETRON SPUTTERING. Acta Metall Sin, 1994, 30(17): 233-237.

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Abstract Deposition technique of (Ti,Al)N films sputtered in the Ar＋N2 atmosphere using reactive DC magnetron method was studied. The hardness, wear resistance and oxidation resistance of (Ti,Al)N films are superior to those of TiN films. The AES results show that the superior antioxidation characteristic of (Ti,Al) N films at high temperatures results from the formation of protective Al2O3 layers as a result of selective oxidation of Al.

Key words: (Ti Al)N film DC magnetron sputtering oxidation resistance

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1994/V30/I17/233

1IkedaT,SatohH．ThinSolidFilms,1991;195:992JehnHA,HofmannS,RuckbornVE,MunzWD．JVacSciTechnol,1986;A4:27013JehnHA,HofmannS,MunzWD．ThinSolidFilms,1987;153:454张承忠．金属的腐蚀与保护．北京:冶金工业出版社,1985,90

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