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Acta Metall Sin  1989, Vol. 25 Issue (3): 152-154    DOI:
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PREPARATION OF LN_2 TEMPERATURE REGION SUPERCONDUCTOR FILM ON Si(100) SUBSTRATE
HU Qingyu;ZHAO Hangwei;WEN Lishi;WANG Yongzhong;QIAO Guiwen Institute of Metal Research; Academia Sinica; Shenyang
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HU Qingyu;ZHAO Hangwei;WEN Lishi;WANG Yongzhong;QIAO Guiwen Institute of Metal Research; Academia Sinica; Shenyang. PREPARATION OF LN_2 TEMPERATURE REGION SUPERCONDUCTOR FILM ON Si(100) SUBSTRATE. Acta Metall Sin, 1989, 25(3): 152-154.

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Abstract  We report the experimental results of the prepartion of YBaCuO superconductorthin film on Si (100) substrate by the method of ion beam sputtering deposition. A ZrO_2 buf-fer layer was applied to Si (100) substrate, and was found to play an important role in resist-ing the diffusion of Si toward the film. The thin film is mainly a 123 phase with strong c-axispreferred orentation. The onset transition temperature of the film is 100 K and the finaltransition temperature 78 K.
Key words:  superconductor YBaCuO      thin film      Si substrate     
Received:  18 March 1989     
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