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高浓度、高性能Pd胶体的制备及其活化机理 |
屈硕硕1,2,祝清省2( ),巩亚东1,杨玉莹1,李财富2,高世安2 |
1 东北大学机械工程与自动化学院 沈阳 110819 2 中国科学院金属研究所沈阳材料科学国家(联合)实验室 沈阳 110016 |
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Preparation and Activation Mechanism of Pd Colloid with High Concentration and Performance |
Shuoshuo QU1,2,Qingsheng ZHU2( ),Yadong GONG1,Yuying YANG1,Caifu LI2,Shian GAO2 |
1 School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110819, China 2 Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China |
引用本文:
屈硕硕,祝清省,巩亚东,杨玉莹,李财富,高世安. 高浓度、高性能Pd胶体的制备及其活化机理[J]. 金属学报, 2017, 53(4): 487-493.
Shuoshuo QU,
Qingsheng ZHU,
Yadong GONG,
Yuying YANG,
Caifu LI,
Shian GAO.
Preparation and Activation Mechanism of Pd Colloid with High Concentration and Performance[J]. Acta Metall Sin, 2017, 53(4): 487-493.
[1] | Lee C H, Hwang S, Kim S C, et al.Cu electroless deposition onto Ta substrates[J]. Electrochem. Solid-State Lett., 2006, 9: C157 | [2] | Lee C H, Lee S C, Kim J J.Bottom-up filling in Cu electroless deposition using bis-(3-sulfopropyl)-disulfide (SPS)[J]. Electrochim. Acta, 2005, 50: 3563 | [3] | Smy T, Tan L, Dew S K, et al.Simulation of electroless deposition of Cu thin films for very large scale integration metallization[J]. J. Electrochem. Soc., 1997, 144: 2115 | [4] | Torres J.Advanced copper interconnections for silicon CMOS technologies[J]. Appl. Surf. Sci., 1995, 91: 112 | [5] | Kim K, Jin S, Kwon O J.Effect of Pd precursor status on sonochemical surface activation in Cu electroless deposition[J]. Appl. Surf. Sci., 2016, 364: 45 | [6] | Lee C L, Huang Y C, Kuo L C.Catalytic effect of Pd nanoparticles on electroless copper deposition[J]. J. Solid State Electrochem., 2007, 11: 639 | [7] | Zabetakis D, Dressick W J.Selective electroless metallization of patterned polymeric films for lithography applications[J]. ACS Appl. Mater. Interfaces, 2009, 1: 4 | [8] | Yang C C, Wan C C, Wang Y Y.Synthesis of Ag/Pd nanoparticles via reactive micelles as templates and its application to electroless copper deposition[J]. J. Colloid Interface Sci., 2004, 279: 433 | [9] | Zhang Y H, Yan T T, Yu S Q, et al.Electroless copper deposition in the photographic gelatin layer[J]. J. Electrochem. Soc., 1999, 146: 1270 | [10] | Lo S H Y, Wang Y Y, Wan C C. Long-term stability of Cu/Pd nanoparticles and their feasibility for electroless copper deposition[J]. Electrochim. Acta, 2008, 54: 727 | [11] | Fujiwara Y, Kobayashi Y, Kita K, et al.Ag nanoparticle catalyst for electroless Cu deposition and promotion of its adsorption onto epoxy substrate[J]. J. Electrochem. Soc., 2008, 155: D377 | [12] | Hutchings G J.Nanocrystalline gold and gold palladium alloy catalysts for chemical synthesis[J]. Chem. Commun., 2008, 1148 | [13] | Nicolas-Debarnot D, Pascu M, Vasile C, et al.Influence of the polymer pre-treatment before its electroless metallization[J]. Surf. Coat. Technol., 2006, 200: 4257 | [14] | Hsu H H, Teng C W, Lin S J, et al.Sn/Pd catalyzation and electroless Cu deposition on TaN diffusion barrier layers[J]. J. Electrochem. Soc., 2002, 149: C143 | [15] | Okada S, Kamegawa T, Mori K, et al.An electroless deposition technique for the synthesis of highly active and nano-sized Pd particles on silica nanosphere[J]. Catal. Today, 2012, 185: 109 | [16] | Charbonnier M, Goepfert Y, Romand M, et al.Electroless plating of glass and silicon substrates through surface pretreatments involving plasma-polymerization and grafting processes[J]. J. Adhes., 2004, 80: 1103 | [17] | Osaka T, Takamatsu H, Nihei K.A Study on activation and acceleration by mixed PdCl2/SnCl2 catalysts for electroless metal deposition[J]. J. Electrochem. Soc., 1980, 127: 1021 | [18] | O'Sullivan E J M, Horkans J, White J R, et al. Characterization of PdSn catalysts for electroless metal deposition[J]. IBM J. Res. Dev., 1988, 32: 591 | [19] | Cui X Y, Hutt D A, Scurr D J, et al.The evolution of Pd/Sn catalytic surfaces in electroless copper deposition[J]. J. Electrochem. Soc., 2011, 158: D172 | [20] | Svendsen L G, Osaka T, Sawai H.Behavior of Pd/Sn and Pd catalysts for electroless plating on different substrates investigated by means of rutherford backscattering spectroscopy[J]. J. Electrochem. Soc., 1983, 130: 2252 | [21] | Froment M, Queau E, Martin J R, et al.Structural and analytical characteristics of adsorbed Pd-Sn colloids[J]. J. Electrochem. Soc., 1995, 142: 3373 | [22] | Chen L J, Wan C C, Wang Y Y.Chemical preparation of Pd nanoparticles in room temperature ethylene glycol system and its application to electroless copper deposition[J]. J. Colloid Interface Sci., 2006, 297: 143 | [23] | Harraz F A, El-Hout S E, Killa H M, et al. Palladium nanoparticles stabilized by polyethylene glycol: Efficient, recyclable catalyst for hydrogenation of styrene and nitrobenzene[J]. J. Catal., 2012, 286: 184 | [24] | Kondo K, Ishikawa J, Takenaka O, et al.Electroless copper plating in the presence of excess triethanol amine[J]. J. Electrochem. Soc., 1990, 137: 1859 | [25] | Nicolas-Debarnot D, Pascu M, Vasile C, et al.Influence of the polymer pre-treatment before its electroless metallization[J]. Surf. Coat. Technol., 2006, 200: 4257 | [26] | Rene E, Van G, Andrzej A.Handbook of X-Ray Spectrometry Version 2, 2002 | [27] | Shukla S, Seal S, Akesson J, et al.Study of mechanism of electroless copper coating of fly-ash cenosphere particles[J]. Appl. Surf. Sci., 2001, 181: 35 |
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