|
|
|
| Study on the micro structure and residual stress of nanocrystalline diamond film |
| ;Dunwen Zuo;Wenzhuang Lu;Min Wang |
| 南京航空航天大学 |
|
Cite this article:
Dunwen Zuo; Wenzhuang Lu; Min Wang. Study on the micro structure and residual stress of nanocrystalline diamond film. Acta Metall Sin, 2008, 44(1): 74-78 .
|
|
|
Abstract Nanocrystalline diamond film is obtained at the grid and substrate bias current in the self-made double bias HFCVD system. The micro structure of the film is analyzed by Raman, SEM and AFM, and elastic modulus and residual stress are investigated by nano-indentation and XRD method. The results show that the increasing of grid and substrate bias current will cause the decreasing of grain size and the increasing of sp2 non-diamond content in the film. The grid and substrate bias current lead to the decreasing of elastic modulus and thermal stress in the diamond film. The non-diamond impurity induces the compression intrinsic stress in the film. The grid bias current results in the increasing of intrinsic stress as the increasing of grain boundary. But the substrate bias current leads to the weak ability of resistance to deformation as a lot of non-diamond content in the grain boundary, which results in the decreasing of intrinsic stress.
|
|
Received: 18 April 2007
|
|
|
[1]Zuo D W,Song S L,Xiang B K,Wang M.Key Eng Mater, 2004;258-259:517
[2]LüF X.Physics,2003;32:383 (吕反修．物理，2003；32：383)
[3]Zhou D,Krauss A R,Qin L C.J Appl Phys,1997;82: 4546
[4]Michler J,Mermoux M,Kaenel Y V,Haounib A,Lu- cazeaub G,Blank E.Thin Solid Films,1999;357:189
[5]Yang J X,Li C M,Chen G C,Lii F X,Tang W Z,Song J H,Tong Y M.J Synth Cryst,2004;33:674 (Yang J X,Li C M,Chen G C,LüF X,Tang W Z,Song J H,Tong Y M.人工晶体学报，2004；33：674)
[6]Durand O,Bisaro R,Brierley C J,Galtier P,Kennedy G R,Kriiger J K,Olivier J.Mater Sci Eng,2000;A228:217
[7]Sharda T,Soga T,Jimbo T,Umenoa M.Diamond Relat Mater,2001;10:352
[8]Chalker P R,Jones A M,Johnston C,Buckley-Golder I M.Surf Coat Technol,1991;47:365
[9]Xu F,Zuo D W,Lu W Z,Li X F,Xiang B K,Wang M. Key Eng Mater,2006;315-316:646
[10]Xu F,Zuo D W,Lu W Z,Li L,Wang M.Chin J Mech Eng,2007;43(6):21 (徐锋，左敦稳，卢文壮，李磊，王珉．机械工程学报，2007；43(6)：21)
[11]Zhang H Y,Zuo D W,Xu F,Yan J.J Synth Cryst,2007; 36(1):170 (张海余，左敦稳，徐锋，闫静．人工晶体学报，2007；36(1)：170)
[12]May P W,Smith J A,Mankelevich Y A.Diamond Relat Mater,2006;15:345
[13]Rhodin T N,Walton D.Metal Surface:Structure,Ener- getics and Kinetics.Metals Park,OH:ASM,1963:272
[14]Chiu C C,Liou Y,Juang Y D.Thin Solid Films,1995; 260:118
[15]Li X M,Wang J D,Chen D R,Liu B,Liu F B.J Chin Ceram Soc,2005;33:1539 (李学敏，汪家道，陈大融，刘兵，刘峰斌．硅酸盐学报，2005；33：1539)
[16]Liu Z P,Wang J C,Yang Y L.Tool Eng,2005;39(12):30 (刘志平，王加春，杨育林．工具技术，2005；39(12)：30)
[17]Hoffman D W,Kulka C M.J Vacuum Sci,1985;3A:2600 |
| No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
| |
Shared |
|
|
|
|
| |
Discussed |
|
|
|
|
