Acta Metall Sin  1998, Vol. 34 Issue (6): 667-672    DOI:

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THE EFFECT OF PREFERRED ORIENTATION ON X-RAY STRESS MEASUREMENT

YU Ligen(State Key Lab. for Powder Metallurgy; Central South University of Technology; Chungsha 410083)HE Jiawen; B. C.Hendrix(State Key Lab. for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049)Correspondent: YU Ligen; Tel: (0731)8826911-3630; Fad: (0731)8825755

YU Ligen(State Key Lab. for Powder Metallurgy; Central South University of Technology; Chungsha 410083)HE Jiawen; B. C.Hendrix(State Key Lab. for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049)Correspondent: YU Ligen; Tel: (0731)8826911-3630; Fad: (0731)8825755. THE EFFECT OF PREFERRED ORIENTATION ON X-RAY STRESS MEASUREMENT. Acta Metall Sin, 1998, 34(6): 667-672.

Abstract References Related Articles Recommended Metrics Download:  PDF(453KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Based on the boundary conditions for prefer--oriellted polycrystals under loading,a new model for the calculation of X--ray elastic constallts (XEC) for prefer--oriented materials,the weighted Hill model, is proposed. The model is applied to calculate the X--my stress measurement curves of some model materials. In order to check the model, the stresses in electroplated and brush--plated copper films are measured. The experimelltal results have good comparison with the calculated results. This helps to explain the low op angle curVature of the stress measuremellt curve for plasma enhanced chemical vapor deposition (PCVD) TiN films. It is mainly caused by the columnar structure exsisted in the PCVD TiN films. When the stress measurement curve has a linear zone at the high op angle, it is suggested to use the slope of the linear zone for the stress calculation. Key words:  preferred orientation      thin film      X--ray elastic constant(XEC)      weighted Hill model      X--ray stress measurement      Received:  18 June 1998      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1998/V34/I6/667 1 Hauk V M. Adv X-Ray Anal. 1983; 27: 101 2 Noyan I C,Cohen J B.Adv X-Ray Anal 1983;27:129 3 Perry ,A.J:Surf Coat Technol ,1990;4:231 4 Perry A J, Jagner M, Sproul W D, Rudnik P J. Surf Coat Technol 1990; 42: 49 5 Dolle H, Cohen J B. Met Trans , 1980; 11A: 159 6 Dolle H, Hank V. Z Metalkde , 1978; 69: 410 7 Brakman C M.J Appl Cryst, 1983; 16: 325 8 Sprauel J M, Francois M, Barral M. ICRS2, London and New York: Elesevier Applied Science 1989: 172 9 Krier J, Rupporsbery H, Berveiller M, Lipinski P. Textures Microsturct 1991; 14—18: 1147 [1] CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong. Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property[J]. 金属学报, 2021, 57(4): 473-490. [2] ZHENG Xiaohang, NING Rui, DUAN Jiatong, CAI Wei. Martensitic Transformation and Damping Behavior of Ti70-xTa15Zr15Fex (x=0.3, 0.6, 1.0) Shape Memory Thin Films[J]. 金属学报, 2020, 56(12): 1690-1696. [3] Dongyu HE,Yuxin LIU. PFM Study of the 90° Step-by-Step Domain Switching and the Temperature Effect in 0.8PbTiO3-0.2Bi(Mg0.5Ti0.5)O3 Ferroelectric Thin Film[J]. 金属学报, 2019, 55(3): 325-331. [4] HE Xianmei, TONG Liuniu, GAO Cheng, WANG Yichao. Effect of Nd Content on the Structure and Magnetic Properties of Si(111)/Cr/Nd-Co/Cr Thin Films Prepared by Magnetron Sputtering[J]. 金属学报, 2019, 55(10): 1349-1358. [5] Xiaoqin MA, Qingfeng ZHAN, Jincai LI, Qingfang LIU, Baomin WANG, Runwei LI. Influence of Oblique Sputtering on Stripe Magnetic Domain Structure and Magnetic Anisotropy of CoFeB Thin Films[J]. 金属学报, 2018, 54(9): 1281-1288. [6] Yachao SUN, Minggang ZHU, Rui HAN, Xiaoning SHI, Nengjun YU, Liwei SONG, Wei LI. Magnetic Viscosity of Anisotropic Rare Earth Permanent Films[J]. 金属学报, 2018, 54(3): 457-462. [7] LI Xiaoyan. ATOMISTIC SIMULATIONS OF BAUSCHINGER EFFECT IN NANOCRYSTALLINE ALUMINUM THIN FILMS[J]. 金属学报, 2014, 50(2): 219-225. [8] SUN Lina, TAN Jun, BA Dechun, YUAN Peixin. UPCONVERSION WHITE PHOTOLUMINESCENCE AND FERROELECTRIC PROPERTY FOR Er3+-Tm3+- Yb3+ TRI-CODOPED Bi4Ti3O12 THIN FILM[J]. 金属学报, 2014, 50(1): 88-94. [9] LIU Yin, LIU Tie, WANG Qiang, WANG Huimin, WANG Li, HE Jicheng. EFFECT OF HIGH MAGNETIC FIELD ON CRYSTAL ORIENTATION, MORPHOLOGY AND MAGNETOSTRICTION OF TbFe2 AND Tb0.27Dy0.73Fe1.95 ALLOYS DURING HEAT TREATMENT PROCESS[J]. 金属学报, 2013, 49(9): 1148-1152. [10] LIU Qinghua,HUANG Yujin,LIU Jian,HU Qiaodan,LI Jianguo . MICROSTRUCTURE AND CRYSTAL ORIENTATION OF THE STEADY GROWTH ZONE IN THE DIRECTION ALLY SOLIDIFIED Ni-Fe-Ga-Co MAGNETIC SHAPE MEMORY ALLOYS[J]. 金属学报, 2013, 29(4): 391-398. [11] YU Lihua, MA Bingyang, XU Junhua. INFLUENCE OF C CONTENT ON STRUCTURE AND MECHANICAL PROPERTIES OF ZrCN COMPOSITE FILMS[J]. 金属学报, 2012, 48(4): 469-474. [12] TANG Ruihe YANG Zhigang ZHANG Chi YANG Bai LIU Xiaofang YU Ronghai. MICROSTRUCTURE, MAGNETIC AND MAGNETOTRANSPORT PROPERTIES OF Co-C NANOCOMPOSITE THIN FILMS[J]. 金属学报, 2011, 47(4): 469-474. [13] LI Zhuguo MIYAKE Shoji. STRUCTURE AND OPTICAL PROPERTIES OF HIGH-RATE LOW-TEMPERATURE GROWN TiO2 THIN FILMS BY REACTIVE MAGNETRON SPUTTERING[J]. 金属学报, 2010, 46(1): 13-18. [14] ZHANG Bingsen LI Maolin WANG Jingjing SUN Benzhe QI Yang . FABRICATION AND CRYSTALLINITY OF Bi2Sr2CaCu2O8+δ THIN FILMS BY MOLECULAR BEAM EPITAXY[J]. 金属学报, 2009, 45(6): 663-672. [15] ;. THE APPLICATION OF HIGH-CONCENTRATION OZONE IN THE PREPARATION OF BI-BASED OXIDE THIN FILMS BY MOLECULAR BEAM EPITAXY[J]. 金属学报, 2008, 44(6): 647-651 . No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed