Acta Metall Sin  1995, Vol. 31 Issue (23): 489-492    DOI:

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PULSED PLASMA PRODUCTION OF c-BN THIN FILMS AT ROOM TEMPERATURE AND LOW PRESSURE

YAN Pengxun;YANG Size;SUN Mu;REN Yufeng;LI Bing;CHEN Xichen(Institute of Physics; Chinese Academy of Sciences;Beijing 100080)(Manuscript received 1995-03-17;in revised form 1995-06-19)

YAN Pengxun;YANG Size;SUN Mu;REN Yufeng;LI Bing;CHEN Xichen(Institute of Physics; Chinese Academy of Sciences;Beijing 100080)(Manuscript received 1995-03-17;in revised form 1995-06-19). PULSED PLASMA PRODUCTION OF c-BN THIN FILMS AT ROOM TEMPERATURE AND LOW PRESSURE. Acta Metall Sin, 1995, 31(23): 489-492.

Abstract References Related Articles Recommended Metrics Download:  PDF(332KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Using pulsed plasma technique the cubic boron nitride thin films has been produced on the single silicon,NaCl or GCr15 bearing steel substrate at room temperatureand low pressure.The SEM,TEM,IR,AES,microhardness tester and scratching tester were used to examine the properties and structure of boron nitride thin films on the surface of various substrates.The results show that the structure of BN thin films strongly depends on the experimental conditions, the formation of the nuclei has no relationship with substrate materials,but growth of the nuclei depends on the substrate partly. Key words:  pulsed plasma      c-BN thin films      room temperature      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1995/V31/I23/489 1WentorfRH．JChemPhys,1957;26:9562WeissmentelC．JVacSciTechnol．1981;18:1793TakahashiH,ItohH,TaheuchiA．JCrystGrowth,1979;47:2454OkamotoM,UtsumiY,OsakaY．JpnJApplPhys．1990;29:L10045ShunfieldS,WolfsonR．JVacSciTechnol,1983;41:3236FriedmannTA,McCartgKF,KlausEJ,BoehmeD．ApplPhysLett．1992;61:24067吴成,江德仪,袁定朴,杨思泽,沈志刚,李椿萱．核裂变与等离子体物理,1989;9:1788阎鹏勋,杨思泽,李兵,陈熙琛．科学通报,1994;39:15479YanPX,YangSZ,YangJ,LiQ,LiB．ChinPhysLett,1994;11:55810YanPX,YangSZ,LiB,ChenXC,NuclInstrumMethodsPhysRes,1994;B95:55 [1] Yaoxiang GENG,Ojied TEGUS,Haibin WANG,Chuang DONG,Yuxin WANG. Effect of Sn Addition on Microstructure and Magnetism of MnFe(P, Si) Alloy[J]. 金属学报, 2017, 53(1): 77-82. [2] Liang YANG,Shubo GAO,Yanli WANG,Teng YE,Lin SONG,Junpin LIN. EFFECT OF Si ADDITION ON THE MICROSTRUCTURE AND ROOM TEMPERATURE TENSILE PROPERTIES OF HIGH Nb-TiAl ALLOY[J]. 金属学报, 2015, 51(7): 859-865. [3] ZHU Chunlei, LI Sheng, LI Haizhao, ZHANG Ji. EFFECT OF THERMAL EXPOSURE AT 750 ℃ ON ROOM TEMPERATURE TENSILE DUCTILITY OF CAST TiAl ALLOY WITH DIRECTIONAL LAMELLAR MICROSTRUCTURE[J]. 金属学报, 2014, 50(12): 1478-1484. [4] CUI Chongliang,ZHU Tianlong,LENG Zhe,WU Ruizhi,ZHANG Jinghuai,ZHANG Milin. EFFECTS OF COMBINED ADDITION OF Y AND Nd ON MICROSTRUCTURE AND TEXTURE AFTER COMPRESSION OF Mg-Li ALLOY AT ROOM TEMPERATURE[J]. 金属学报, 2012, 48(6): 725-732. [5] GAO Qian SUN Benzhe QI Yang QI Lianzhong. STRUCTURE AND MAGNETIC BEHAVIOR OF Zn1−xCoxO CRYSTAL POWDERS PREPARED BY SOL–GEL TECHNIQUE[J]. 金属学报, 2011, 47(3): 337-343. [6] NIE Defu ZHAO Jie ZHANG Junshan. AN APPROACH TO ESTIMATE ROOM TEMPERATURE CREEP OF STRUCTURAL STEELS[J]. 金属学报, 2011, 47(2): 179-184. [7] DONG Yawei KANG Guozheng LIU Yujie WANG Hong CHENG Xiaojuan. EXPERIMENTAL STUDY ON UNIAXIAL RATCHETING OF 20 STEEL WITH HIGH NUMBER OF CYCLES AT ROOM TEMPERATURE[J]. 金属学报, 2009, 45(7): 826-829. [8] . STRESS--STRAIN BEHAVIORS AROUND THE YIELD STRENGTH IN SEQUENTIAL ROOM TEMPERATURE CREEP TESTS[J]. 金属学报, 2009, 45(7): 840-843. [9] JI Gang; Ze ZHANG. OXYGEN PARTIAL PRESSURE MODULATION EFFECT OF THE FERROMAGNETISM IN Zn1-xCoxO1-δ MAGNETIC SEMICONDUCTOR[J]. 金属学报, 2008, 44(11): 1399-1403 . [10] CUI Yuyou; XIANG Hongfu; JIA Qing; YANG Rui. Effects of Thermal Exposure on the Tensile and Fatigue Properties of Cast Ti—47Al—2Cr—2Nb--0.15B Alloy[J]. 金属学报, 2005, 41(1): 108-. [11] XU Songbo；CHEN Junming (Shanghai Institute of Metallurgy; Chinese Academy of Sciences)(Manuscript received 5 July; 1993; in revised form 6 September 1993). AN IMPROVEMENT OF ROOM TEMPERATURE DUCTILITY OF Ni_3Al(B)-Cr BASE ALLOYS BY MULTI-ALLOYING OF Mg AND RE[J]. 金属学报, 1994, 30(5): 221-224. [12] YAN Pengxun; YANG Size; CHEN Xishen (Institute of physics; Chinese Academy of Sciences; Beijing)(Manuscript received 3 May; 1994;in revised form 28 July; 1994). ADHESIVE STRENGTH OF TiN COATING DEPOSITED BY PULSED HIGH ENERGY DENSITY PLASMA[J]. 金属学报, 1994, 30(23): 503-507. [13] ZHANG Kanghou;CHEN Lili Institute of Precious Metals; Kunming. ROOM TEMPERATURE AND 700℃ ISOTHERMAL SECTIONS OF Gd-Pd-Pt(Gd≤33 at. -％) PHASE DIAGRAM[J]. 金属学报, 1991, 27(3): 147-149. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed