FORMATION OF IRON NITRIDE FILMS BY ION BEAM ASSISTED DEPOSITION

Acta Metall Sin

1994, Vol. 30

Issue (18): 273-276 DOI:

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FORMATION OF IRON NITRIDE FILMS BY ION BEAM ASSISTED DEPOSITION

JIANG Hai; WU Qinglan; TAO kun; LI Hengde(Tsinghua University; Beijing)

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JIANG Hai; WU Qinglan; TAO kun; LI Hengde(Tsinghua University; Beijing). FORMATION OF IRON NITRIDE FILMS BY ION BEAM ASSISTED DEPOSITION. Acta Metall Sin, 1994, 30(18): 273-276.

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Abstract The composition and structure of the Fe-N films were investigated by RBS and XRD.The results of XRD shown that the films consist of γ'-Fe4N, ε-Fe2-3N and ζ-Fe2N phases or mixture of these phases under different deposition parameters. A phase region diagram in dependence on deposition temperature and N / Fe atomic arrival ratio was proposed.

Key words: ion beam assisted deposition iron nitride magnetic film

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1994/V30/I18/273

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[1]	ZHU Hong; LIU Xianghuai; REN Congxin; CHEN Guoliang; ZOU Shichang (Ion Beam Lahoratory Shanghai Institute of Metallurgy; Chinese Academy of Sciences;Shanghai 200050). STRUCTURE AND PROPERTIES OF DIAMOND LIKE CARBON FILMS BY LOW ENERGY ION BEAM ASSISTED DEPOSITION USING A SINGLE ION SOURCE[J]. 金属学报, 1995, 31(15): 139-144.
[2]	LIU Hanwei;CHEN Yuanru (Southwest Jiaotong University; Chengdu)ZHANG Xushou (Laboratory of Solid Lubrication; Lanzhou institute of Chemical Physics;Chinese Academy of Sciences; Lanzhou). TRIBOLOGICAL PROPERTIES OF TiN FILM BY ION BEAM ASSISTED DEPOSITION[J]. 金属学报, 1994, 30(19): 323-326.
[3]	JIANG Hai;TAO Kun;LI Hengde Tsinghua University. Beijing lecturer;Department of Materials Science and Engineering;Tsinghua University; Beijing 100084. PREPARATION OF B-N FILMS BY ION BEAM ASSISTED DEPOSITION[J]. 金属学报, 1993, 29(4): 77-80.

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