ULTRA-MICROHARDNESS OF N~+ IMPLANTED LAYER ON 1Cr18Ni9TiSTAINLESS STEEL

Acta Metall Sin

1994, Vol. 30

Issue (15): 140-144 DOI:

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ULTRA-MICROHARDNESS OF N~+ IMPLANTED LAYER ON 1Cr18Ni9TiSTAINLESS STEEL

YANG Anjing;CAI Yiwei;CHEN Qiulong(Shanghai Jiaotong University)

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YANG Anjing;CAI Yiwei;CHEN Qiulong(Shanghai Jiaotong University). ULTRA-MICROHARDNESS OF N~+ IMPLANTED LAYER ON 1Cr18Ni9TiSTAINLESS STEEL. Acta Metall Sin, 1994, 30(15): 140-144.

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Abstract An ultra-microhardness tester typed UMHT-3 was used to measure the characteristic hardness of N+ implanted layer on 1Cr18Ni9Ti stainless steel.Depth and nitrogen concentration profile of the N+ implanted layer were determined by means of AES in combination with high precision profilometer. The depth of N+ implanted layer in 1Cr18Ni9Ti steel is 0.18μm at 90 keV and 3ｘ10~17 N+/cm2. Its characteristic hardness,HV 3.47 GPa under load of l mN, shows that N+ implantation can increase the surface hardness by more than 3 times. The appropriate testing load selected should be equal or less than l mN.

Key words: 1Cr18Ni9Ti ion implantation ultra-microhardness

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1JonssonB,HogmarkS．ThinSolidFilms,1984:114:2572OnateJC,DennisJK,HamiltonS．HeatTreatMet．1987;14(3):7

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