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倾斜溅射对CoFeB薄膜条纹磁畴结构与磁各向异性的影响 |
马晓琴1,2, 詹清峰2,3(), 李金财2, 刘青芳1, 王保敏2, 李润伟2 |
1 兰州大学物理科学与技术学院磁学与磁性材料教育部重点实验室 兰州 730000 2 中国科学院宁波材料技术与工程研究所浙江省磁性材料及其应用技术重点实验室 中国科学院磁性材料与器件重点实验室 宁波 315201 3 华东师范大学物理与材料科学学院精密光谱科学与技术国家重点实验室 上海 200241 |
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Influence of Oblique Sputtering on Stripe Magnetic Domain Structure and Magnetic Anisotropy of CoFeB Thin Films |
Xiaoqin MA1,2, Qingfeng ZHAN2,3(), Jincai LI2, Qingfang LIU1, Baomin WANG2, Runwei LI2 |
1 Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, School of Physical Sciences and Technology, Lanzhou University, Lanzhou 730000, China 2 Key Laboratory of Magnetic Materials and Devices, Zhejiang Province Key Laboratory of Magnetic Materials and Application Technology, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China 3 State Key Laboratory of Precision Spectroscopy, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China |
引用本文:
马晓琴, 詹清峰, 李金财, 刘青芳, 王保敏, 李润伟. 倾斜溅射对CoFeB薄膜条纹磁畴结构与磁各向异性的影响[J]. 金属学报, 2018, 54(9): 1281-1288.
Xiaoqin MA,
Qingfeng ZHAN,
Jincai LI,
Qingfang LIU,
Baomin WANG,
Runwei LI.
Influence of Oblique Sputtering on Stripe Magnetic Domain Structure and Magnetic Anisotropy of CoFeB Thin Films[J]. Acta Metall Sin, 2018, 54(9): 1281-1288.
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