金属学报  2004, Vol. 40 Issue (2): 220-224

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真空阴极弧离子镀类金刚石碳膜Raman光谱研究

李刘合;武咏琴;崔旭明;张海泉;张彦华;夏立芳;朱剑豪

北京航空航天大学机械工程与自动化学院; 北京 100083

Raman Spectra of Diamond-Like Carbon Films Deposited by Vacuum Cathodic Arc

LI Liuhe; WU Yongqin; CUI Xuming; ZHANG Haiquan; ZHANG Yanhua;;XIA Lifang;Paul K. Chu

School of Mechanical Engineering and Automation; Beijing University of Aeronautic and Astronautic; Beijing 100083

李刘合; 武咏琴; 崔旭明; 张海泉; 张彦华; 夏立芳; 朱剑豪 . 真空阴极弧离子镀类金刚石碳膜Raman光谱研究[J]. 金属学报, 2004, 40(2): 220-224 .
, , , , , , . Raman Spectra of Diamond-Like Carbon Films Deposited by Vacuum Cathodic Arc[J]. Acta Metall Sin, 2004, 40(2): 220-224 .

摘要 参考文献 相关文章 Metrics 全文: PDF(3188 KB)   摘要: 分别采用带有和不带有弯曲弧磁过滤器的真空阴极弧离子镀方法, 在不同的镀膜电流以及不同基片偏流下制备了类金刚石碳膜, 对比了不同结构下类金刚石碳膜的Raman光谱的特点. 对其Raman光谱的D峰和G峰采用Gaussian-Lorentzion的几率分布进行了分峰, 并着重讨论了基片偏流、弯曲磁场等沉积参数对膜结构的影响. 结果表明, 氩分压对膜结构影响不大, 较大的偏流以及弯曲磁场的加入均有利于sp3杂化碳键的形成. 关键词 ： Raman光谱,  类金刚石碳膜     Abstract：The structures of diamond-like carbon (DLC) films deposited by vacuum arc evaporation with and without curve arc magnetic filter are studied and compared using Raman shifts. The Raman shifts are deconvolved into D peak and G peak with Gaussian-Lorentzion fitness. The effects of the deposition parameters such as bias voltage and bias current strength of curved magnetic fields on the DLC films structures are discussed. The results show that Ar gas pressure has not obvious effect on the formation of the DLC film; moderate bias current increases the sp3 content; the sp2 cluster can be increased for a too high substrate bias. The magnetic curved filter not only can remove the carbon macroparticles, but also can improve the sp3 content. Key words： Raman spectrum    diamond-like carbon film 收稿日期: 2003-02-21      ZTFLH:  O484.4   服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 李刘合 武咏琴 崔旭明 张海泉 张彦华 夏立芳 朱剑豪 44.8K 链接本文: https://www.ams.org.cn/CN/      或      https://www.ams.org.cn/CN/Y2004/V40/I2/220 [1] Angus J C, Wang Y X. In: Clausing R E ed., Diamond and Diamond-Like Films and Coatings. New York: Plenum Press, 1991: 173 [2] Gupta B K, Bhushan B. Thin Solid Films, 1995; 270: 391 [3] Lee Kwan-Ryeol, Baik Young-Joon, Eun Kwang Yong. Diamond Relat Mater, 1994; 3: 1230 [4] Yin D C, Xu N K, Liu Z T, Han Y, Zheng X L. Surf Coat Technol, 1996; 78: 31 [5] Tay K, Shi X, Tan H S, Yang H S, Sun Z. Surf Coat Technol, 1998; 105: 155 [6] Abello L, Lucazeau G. Diamond Relat Mater, 1992; 1: 512 [7] Chalker P R. In: Clausing R E ed., Diamond and Diamond-Like Films and Coatings. New York: Plenum Press, 1991: 127 [8] Li L H, Xia L F, Sun M R, Ma X X, Li G. Bull Sci Technol, 1997; 13: 181 [9] Ferrari A G, Robertson J. Phys Rev, 2001; 64B: 0754141 [10] Li L H, Zhang H Q, Zhang Y H, Chu P K, Tian X B, Xia L F, Ma X X. Mater Sci Eng, 2002; B94: 95 [11] Chen Z Y, Zhao J P, Yano T, Ooie T, Yoneda M, Sakakibara J. J Appl Phys, 2000; 88: 2305 [12] Gilkes K W R, Sands H S, Batchelder D N, Robertson J, Milne W I. Appl Phys Lett, 1997; 70: 1980 [1] 曹凤婷, 魏洁, 董俊华, 柯伟. 20SiMn钢在恒定pH值的碳酸盐溶液中的腐蚀行为*[J]. 金属学报, 2014, 50(6): 674-684. [2] 孙敏 肖葵 董超芳 李晓刚 钟平. 带腐蚀产物超高强度钢的电化学行为[J]. 金属学报, 2011, 47(4): 442-448. [3] 黄立业; 徐可为; 吕坚 . 类金刚石碳膜在纳米划擦过程中的弹-塑性变形及断裂机制分析[J]. 金属学报, 2001, 37(7): 733-736 . [4] 方建慧;唐赟;李郁;阎立诚;陈念贻;王继扬. KPO_3-MoO_3熔盐相图[J]. 金属学报, 1997, 33(4): 395-397. [5] 柳妙修;曹益林;陈念贻;庄志诚. 高苛性比铝酸钠溶液的Raman光谱研究[J]. 金属学报, 1991, 27(6): 155-157. [6] 柳妙修;周佩芳;陈念贻;李郁;柯家骏. SiO_2在铝酸钠溶液中存在状态的研究[J]. 金属学报, 1990, 26(3): 146-149. Viewed Full text Abstract Cited   Shared      Discussed