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Acta Metall Sin  2004, Vol. 40 Issue (1): 83-87     DOI:
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Study Of Al--O--N And Cr--O--N Films Deposited By Arc Ion Plating As Diffusion Barriers
WANG Qimin; WU Yingna; JI Ailing
State Key Laboratory for Corrosion and Protection;Institute of Metal Research;The Chinese Academy of Sciences
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WANG Qimin; WU Yingna; JI Ailing. Study Of Al--O--N And Cr--O--N Films Deposited By Arc Ion Plating As Diffusion Barriers. Acta Metall Sin, 2004, 40(1): 83-87 .

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Abstract  Al--O--N and Cr--O--N thin films were deposited on superalloy DSM11 by arc ion plating (AIP). The effects of flow rates of oxygen and nitrogen on phase composition and the interdiffusion of various elements at high temperature between DSM11 substrate and NiCoCrAlY coating were studied in the systems of DSM11/NiCoCrAlY, DSM11/Al--O--N/NiCoCrAlY and DSM11/Cr--O--N/NiCo- CrAlY. The results indicate that the Al(Cr)--O--N films are polycrystalline with phase constitution of α--Al2O3 + hexagonal AlN or Cr2O3+CrN , respectively. The relative intensity of AlN to Al2O3 or CrN to Cr2O3 is changed with the change of flow rates of oxygen and nitrogen. After oxidation at 1050℃ for 100 h, Al--O--N hindered the interdiffusion of elements between DSM11 and NiCoCrAlY more effectively than Cr--O--N film. The diffusion barrier layers hardly influenced the oxidation kinetics of the NiCoCrAlY coating.
Key words:  Al--O--N      Cr--O--N      diffusion barrier layer      
Received:  01 January 1900     
ZTFLH:  TG111.5  
  TG174.44  

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https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2004/V40/I1/83

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