Acta Metall Sin  2003, Vol. 39 Issue (1): 55-60     DOI:

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Investigation of Phase Structure and Performance of (Ti, Al)N Films Deposited by Arc Ion Plating

LI Mingsheng; WANG Fuhui; WANG Tiegang; GONG Jun; SUN Chao; WEN Lishi

State Key Laboratory for Corrosion and Protection; Institute of Metal Research; The Chinese Academy of Sciences; Shenyang 110016;Institute of Metal Reach; The Chinese Academy of Sciences; Shenyang 110016

LI Mingsheng; WANG Fuhui; WANG Tiegang; GONG Jun; SUN Chao; WEN Lishi. Investigation of Phase Structure and Performance of (Ti, Al)N Films Deposited by Arc Ion Plating. Acta Metall Sin, 2003, 39(1): 55-60 .

Abstract References Related Articles Recommended Metrics Download:  PDF(217KB)  Export:  BibTeX | EndNote (RIS)       Key words:        Received:  18 March 2002      ZTFLH:  TG174.444   Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors LI Mingsheng WANG Fuhui WANG Tiegang GONG Jun SUN Chao WEN Lishi URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2003/V39/I1/55 [1] Ikeda T, Satoh H. Thin Solid Films, 1991; 195: 99 [2] McCIure G W. J Appl Phys, 1974; 45: 2078 [3] Sanderw D. J Vac Sci Technol, 1987; A7: 2339 [4] Sprou W D, Thin Solid Films, 1983; 107: 141 [5] Tomas P. Mater Australia, 1986; 18: 16 [6] Sundgren J E, Johasson B O, Karlsson S E. Thin SolidFilm, 1983; 105: 353 [7] Janczsk-Bienk E, Jensen J, Sorensen G. Mater Sci Eng,1991; A140: 696 [8] Serikawa, Okamoto A. Thin Solid Films, 1983; 101: 1 [9] Burg S, Blom H O, Larsson T, Nender C. J Vac Sci Tech-nol, 1987; A5(2) : 202 [10] Freller H, Haessler H. Thin Solid Films, 1987; 153: 712 [11] von Richthofen A, Cremer R, Witthaut M, Domnick R,Neuschutz D. Thin Solid Films, 1998; 312: 190 [12] Wuther R, Yeung W Y, Phillips M K, McCredie G. ThinSolid Films, 1996; 290-291: 339 [13] Danienl J, Kester, Russell M. J Mater Res, 1993; 8: 1828 [14] Makino Y. Mater Sci Eng, 1995; 2: 67 [15] Ikeda T, Satoh H. Thin Solid Films, 1991; 195: 99 [16] Wahlstrom U, Hultman L, Sundgren J E, Adibi F, PetrovI, Greene J E. Thin Solid Films, 1993; 235: 62 [17] Schuster J C, Bauer J. J Solid State Chem, 1984; 53: 260 [18] Holleck H. J Vac Sci Technol, 1986; A4: 2661 [19] Konig U. Surf Coat Technol, 1987; 33: 91 [20] Li D H, Xiao J M. Material Surface and Interface. P106, Beijing: Tsinghua University Press, 1990: 106(李恒德,肖纪美.材料表面与界面.北京:清华大学出版社.1990:106) [21] Gilles S, Bourhila N, Ikeda S, Bernard C, Madar R. SurfCoat Technol, 1997; 94-95: 285 [22] Zhou M, Makino Y, Nose M, Nogi K. Thin Solid Films,1999; 339: 203 [23] Inoue S, Uehida H, Yoshinaga Y, Koterzawa K. Thin SolidFilms, 1997; 300: 171 [1] WANG Luning, LIU Lijun, YAN Yu, YANG Kun, LU Lili. Influences of Protein Adsorption on the in vitro Corrosion of Biomedical Metals[J]. 金属学报, 2021, 57(1): 1-15. [2] TUNG Feng'en;WANG Yuming Institute of Materials Science; Jilin University; Changchun. X-RAY ANALYSIS OF WORK-HARDENING PROCESS FOR POLYCRYSTALLINE а-BRASS DURING UNIAXIAL TENSILE TEST[J]. 金属学报, 1989, 25(2): 82-84. [3] WANG Jinliang, WANG Chenchong, HUANG Minghao, HU Jun, XU Wei. The Effects and Mechanisms of Pre-Deformation with Low Strain on Temperature-Induced Martensitic Transformation[J]. 金属学报, 2021, 57(5): 575-585. [4] DU Hegui;LIU Xin Northeast University of Technology; Shenyang. KINETICS OF CARBON COMBUSTION IN PLASMA AIR[J]. 金属学报, 1989, 25(2): 85-88. [5] . [J]. 金属学报, 2001, 37(1): 42-46 . [6] . [J]. 金属学报, 1999, 35(3): 320-324 . [7] . [J]. 金属学报, 2000, 36(1): 72-76 . [8] . [J]. 金属学报, 1999, 35(3): 330-333 . [9] . [J]. 金属学报, 1999, 35(3): 334-336 . [10] . [J]. 金属学报, 2000, 36(6): 647-650 . [11] . [J]. 金属学报, 2000, 36(6): 655-658 . [12] No Author. ACTA METALLURGLCA SLNLCA Volume 28 Series A 1992 SUBJECT INDEX[J]. 金属学报, 1992, 28(12): 63-90. [13] . [J]. 金属学报, 2000, 36(7): 780-784 . [14] No Author. ACTA METALLURGICA SINICA(JINSHU XUEBAO) Volume 28 1992 AUTHOR INDEX[J]. 金属学报, 1992, 28(12): 71-94. [15] Хань Яо-вэнь Инсмцмум мемаддов АН КНР;Г.н.Ойкс Московскц цнсмцмум смадц. НЗУЧЕНИЕ ПРОЦЕССОВ ДЕСУЛЬФУРАЦИИ ХНДКОΓО МЕТАЛЛА В ВАКУУМЕ[J]. 金属学报, 1963, 6(2): 98-110. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed