A STUDY OF INTERDIFFUSION OF Pd/Ag BILAYER THIN FILMS BY X-RAY DIFFRACTION STRUCTURE DEPTH PROFILING

Acta Metall Sin

1997, Vol. 33

Issue (7): 742-748 DOI:

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A STUDY OF INTERDIFFUSION OF Pd/Ag BILAYER THIN FILMS BY X-RAY DIFFRACTION STRUCTURE DEPTH PROFILING

TAO Kun;LI Bin;LUO Jian (Tsinghua University; Beijing 100084)

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TAO Kun;LI Bin;LUO Jian (Tsinghua University; Beijing 100084). A STUDY OF INTERDIFFUSION OF Pd/Ag BILAYER THIN FILMS BY X-RAY DIFFRACTION STRUCTURE DEPTH PROFILING. Acta Metall Sin, 1997, 33(7): 742-748.

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Abstract A method has been presented to obtain all X-ray diffraction information, which including the peak intensity, peak position and peak profile, of each layer at different depth respectively. This method can be named as structure depth profiling or computed depth profiling technique of X-ray diffraction (XRD). The samples of Pd(200 nm)/Ag(200 nm) bilayer thin films were used to test this method and to study the interdiffusion in the Pd/Ag system. For sample annealed at 490℃ for 20 min, it was found that there were two solid solutions with different lattice parameter in each layer at different depth. It means that the structure of each layer parallel to the surface is not homogeneous microscopically in the interdiffusion process.

Key words: structure depth profiling XRD Pd/Ag thin films

Received: 18 July 1997

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