OBSERVATION ON SPUTTERING SURFACE OF ALLOYS IN GLOW DISCHARGE

Acta Metall Sin

1989, Vol. 25

Issue (4): 148-150 DOI:

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OBSERVATION ON SPUTTERING SURFACE OF ALLOYS IN GLOW DISCHARGE

REN Jianshi;ZHAO Huilin;ZHANG Gongshu Institute of Metal Research; Academia Sinica; Shenyang

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REN Jianshi;ZHAO Huilin;ZHANG Gongshu Institute of Metal Research; Academia Sinica; Shenyang. OBSERVATION ON SPUTTERING SURFACE OF ALLOYS IN GLOW DISCHARGE. Acta Metall Sin, 1989, 25(4): 148-150.

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Abstract Glow discharge cathodic sputtering of alloys containing second phase precipitatesor injection of oxide particles has been observed with an energy dispersive X-ray spectrometerand scanning electron microprobe. It was shown that the formation of cones during thesputtering in these alloys is due to masking of the matrix by glow sputtering second phaseprecipitates or oxide particles. At steady state, the number density was lound to be a functionof precipitate or oxide particle density in bulk alloys. In addition to local sputtering rate changes,the electrostate effect ?ay play a role in the formation of cones.

Key words: glow discharge cathodic sputtering nickel base alloy

Received: 18 April 1989

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1989/V25/I4/148

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