|
|
|
| TaN／TiN和TaWN／TiN多晶超晶格薄膜的微结构与超硬效应 |
| 许俊华 李戈扬 顾明元 |
| 上海交通大学金属复合材料国家重点实验室;上海 200030 |
|
引用本文:
许俊华; 李戈扬; 顾明元 . TaN／TiN和TaWN／TiN多晶超晶格薄膜的微结构与超硬效应[J]. 金属学报, 1999, 35(11): 1214-1218 .
[1] Koehler J S. Phys Rev, 1977; B2: 547
[2] Lehoczky S L. J Appl Phys, 1978; 49: 5479
[3] Yang W M C, Tsakalakos T, Hilliard J E. J Appl Phys, 1977;48: 876
[4] Pickett Warren E. J Phys F: Met Phys, 1982; 12: 2195
[5] Henein G E, Hilliard J E. J Appl Phys, 1983; 54: 728
[6] Tsakalakos T, Hilliard J E. J Appl Phys, 1983; 54: 734
[7] Cammarata R C, Sieradzki K. Phys Rev Lett, 1989; 62: 2005
[8] Small M K, Nix W D. J Mater Res, 1992, 7: 1553
[9] Fartash A, Fullerton E E, Schuller I K. Phys Rev, 1991; B44:13760
[10] Helmersson U, Todorova S, Barnett S A, Sundgren J E,Markert L C, Greene J E. J Appl Phys, 1987; 62(2). 481
[11] Mirkarimi P B, Hultman L, Barnett S A. Appl Phys Lett,1990; 57(25): 2654
[12] Shinn M, Hultman L, Barnett S A. J Mater Res, 1992; 7(4):901
[13] Chu X, Won g M S, Sproul W D, Rohde S L, Barnett S A.Vac Sci Technol, 1992; A10(4): 1604
[14] Chu X, Barnett S A, Wong M S, Sproul W D. Surf CoatingsTechnol, 1993; 57: 13
[15] Chu X, Barnett S A. J Appl Phys, 1995; 77(9). 4403
[16] Tavares C J, Rebouta L, Almeida B. Surf Coatings Technol,1998; 100/101: 65
[17] Cahn J W. Acta Metall, 1963; 11: 1275 |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
| |
Shared |
|
|
|
|
| |
Discussed |
|
|
|
|
