金属学报  2008, Vol. 44 Issue (3): 325-330

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等离子体浸没离子注入与沉积合成TiN薄膜的滚动接触疲劳寿命和机械性能

刘洪喜 蒋业华 周 荣 周荣锋 金青林 汤宝寅

昆明理工大学机电工程学院

ROLLING CONTACT FATIGUE LIFE AND MECHANICAL PROPERTY OF TiN FILM FABRICATED BY PLASMA IMMERSION ION IMPLANTATION

LIU Hongxi; JIANG Yehua; ZHOU Rong; ZHOU Rongfeng; JIN Qinglin TANG Baoyin

刘洪喜; 蒋业华; 周荣; 周荣锋; 金青林; 汤宝寅 . 等离子体浸没离子注入与沉积合成TiN薄膜的滚动接触疲劳寿命和机械性能[J]. 金属学报, 2008, 44(3): 325-330 .
, , , , , . ROLLING CONTACT FATIGUE LIFE AND MECHANICAL PROPERTY OF TiN FILM FABRICATED BY PLASMA IMMERSION ION IMPLANTATION[J]. Acta Metall Sin, 2008, 44(3): 325-330 .

摘要 参考文献 相关文章 Metrics 全文: PDF(966 KB)   摘要: 用等离子体浸没离子注入与沉积（PIII&D）技术在AISI52100轴承钢表面成功合成了高硬耐磨的氮化钛（TiN）薄膜。膜层元素分布、化学组成和表面形貌分别用X射线衍射（XRD）、X光电子能谱（XPS）和原子力显微镜 （AFM）表征。合成薄膜前后试样的滚动接触疲劳寿命和摩擦磨损性能分别由球棒疲劳磨损试验机和球-盘磨损试验机测定；疲劳破坏后的微观形貌通过扫描电镜（SEM）观察；薄膜力学性能经纳米压痕和纳米划痕试验评价。结果表明，表面膜层中主要存在TiN相，同时含有少量的TO2和钛氮氧的化合物；在优化条件下，氮化钛膜层致密均匀，与基体结合良好，具有很高的硬度和杨氏模量，分别达到25 GPa 和350 GPa；最低摩擦系数由基体的0.92下降到0.2。被处理薄膜试件在90%置信区间下的最大L10、L50、La和L寿命较基体分别提高了5.5倍、2.8倍、2.3倍和2.2倍，疲劳寿命的分散性得到了显著改善. 关键词 ： 等离子体浸没离子注入与沉积,  氮化钛薄膜     Abstract：Titanium Nitride (TiN) hard protective films were fabricated on AISI52100 bearing steel substrate employing plasma immersion ion implantation and deposition (PIII&D) technique. The TiN films have been characterized using a variety of test methods. X-ray diffraction (XRD) analysis indicates that PIII&D results in the formation of three varieties of titanium components in the surface layer, which has also been proved by X-ray photoelectron spectroscopy (XPS) combined with Ar sputtering. Atomic force microscope (AFM) has revealed the deposition of extremely smooth TiN films, having very high uniformity and compact density over large areas. The nanohardness (H) and the elastic modulus (E) of TiN films measurement indicates that the maximum H (E) value is 25GPa (350GPa), increased by 127.3% (59.1%). The friction and wear behaviors and rolling contact fatigue (RCF) life of these samples have also been investigated by ball-on-disc and three-ball-rod testers. Results show that the friction coefficient decrease from 0.92 to 0.2; the L10 、L50 、La and L RCF life of treated sample increases by 5.5, 2.8, 2.3 and 2.2 times, respectively. The RCF life scatter extent of treated sample is improved significantly. Key words： plasma immersion ion implantation and deposition (PIII&D)    titanium nitride (TiN) film    mechanical pro 收稿日期: 2007-07-03      ZTFLH:  TG172   服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 刘洪喜 蒋业华 周荣 周荣锋 金青林 汤宝寅 44.8K 链接本文: https://www.ams.org.cn/CN/      或      https://www.ams.org.cn/CN/Y2008/V44/I3/325 [1]Wan G J,Huang N,Leng Y X,Yang P,Chen J Y.J Inorg Mater,2003;18:904 (万国江，黄楠，冷永祥，杨萍，陈俊英．无机材料学报，2003；18：904) [2]Liu Y F,Zhang G L,Wang J L,Liu C Z,Yang S Z.Acta Phys Sin,2004;53:503 (刘元富，张谷令，王久丽，刘赤子，杨思泽．物理学报，2004；53：503) [3]Zhang Z C,Bei Y F,Du P X,Shen J.Tribology,1996;16: 156 (章宗城，贝韵芬，都佩贤，沈坚．摩擦学学报，1996；16：156) [4]Yan P X,Wu Z G,Xu J W,Zhang Y J,Zhang W W,Liu W M.J Inorg Mater,2004;19:1386 (闫鹏勋，吴志国，徐建伟，张玉娟，张伟伟，刘伟民．无机材料学报，2004；19：1386) [5]Hu S B,Cui K.Mater Prot,2001;34(10):24胡树兵，崔昆．材料保护，2001；34(10)：24) [6]Liu H W,Chen Y R,Zhang X S.Acta Metall Sin,1994; 30:323 (刘捍卫，陈元儒，张绪寿．金属学报，1994；30：323) [7]Tian X B,Wang L P,Ricky K Y F,Chu P K.Mater Sci Eng,2002;A337:236 [8]Hainsworth S V,Sob W C.Surf Coat Technol,2003;163 164:515 [9]Ueda T M,Berni L A,Castro R M.Surf Coat Technol, 2005;200:517 [10]Wang D C,Chiua M C.Surf Coat Technol,2002;156:201 [11]Mukherjee S,Raole P M,John P I.Surf Coat Technol, 2005;157:111 [12]Zeng Z M,Ricky K Y Fu,Tian X B,Paul K Chu.Surf Coat Technol,2004;186:260 [13]Wang S Y,Chu P K,Tang B Y,Zeng X C,Wang X F. Nucl Instrum Methods Phys Res,1997;127-128B:1000 [14]Liu H X,Wang L P,Wang X F,Huang L,Tang B Y.Acta Metall Sin,2006;42:1197 (刘洪喜，王浪平，王小峰，黄磊，汤宝寅．金属学报，2006；42：1197) [15]Lover D G.In:Hoo J J C,ed,ASTM STP 107,1982 [16]Chen Y H,Polonsky I A,Chung Y W,Keer L M.Surf Coat Technol,2002;154:152 [17]Bertoti I,Mohai M,Sullivan J L,Saied S O.Appl Surf Sci,1995;84:357 [18]Casaletto M P,Ingo G M,Kaciulis S,Mattogno G,Pan- dolfi L,Scavia G.Appl Surf Sci,2001;172:167 [19]Xu F C,Wang S J,Lin X H.Chin J Chem Phys,2002; 15:69 (徐富春，王水菊，林秀华．化学物理学报，2002；15：69) [20]Zhao J,Garza E G,Lam K,Jones C M.Appl Surf Sci, 2000;158:246n [1] 夏超, 钱仕, 王东辉, 刘宣勇. 碳离子注入医用Ti性能研究[J]. 金属学报, 2017, 53(10): 1393-1401. [2] 王曦;周建坤;陈酉善;柳襄怀;邹世昌. 离子束增强沉积合成氮化钛薄膜的计算机模拟[J]. 金属学报, 1991, 27(3): 136-141. Viewed Full text Abstract Cited   Shared      Discussed