金属学报  2007, Vol. 43 Issue (11): 1207-1210

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非平衡磁控溅射Ti添加类金刚石薄膜的结构分析

聂朝胤 张碧云 谢红梅

西南大学材料科学与工程学院

聂朝胤; 张碧云; 谢红梅 . 非平衡磁控溅射Ti添加类金刚石薄膜的结构分析[J]. 金属学报, 2007, 43(11): 1207-1210 .

摘要 参考文献 相关文章 Metrics 全文: PDF(722 KB)   摘要: 本研究采用非平衡磁控溅射沉积技术在Si(111)单晶硅片和镜面抛光的渗碳淬火SCM415基片上沉积了无氢高纯类金刚石(DLC)薄膜和无氢Ti添加类金刚石(Ti-DLC)薄膜。高纯DLC采用高纯石墨靶溅射沉积，Ti-DLC采用高纯Ti靶和高纯石墨靶同时溅射沉积而成，通过调节Ti靶的溅射功率获得了含Ti量分别为1.9at.% 、2.14at. %、3at.% 、10.5at.% 、14at.%、25at.% 、34at.%的Ti-DLC薄膜。利用拉曼分光光谱仪(Raman)、X射线光电子能谱仪(XPS) 、X射线衍射仪(XRD)及原子力显微镜(AFM)分析研究了Ti-DLC的组织结构及表面形貌。研究发现，利用非平衡磁控溅射得到的Ti-DLC薄膜，仍具有类金刚石薄膜的sp2、sp3结构，但Ti的加入促进了sp3键向sp2键的转变。添加的Ti以TiC微晶的形式存在于非晶态的DLC中。与Ti添加DLC相比无添加高纯DLC具有更加平滑光洁的表面，但是对于本身就具有一定表面粗躁度的基体来说，Ti的添加有利于弥补基体表面的凸凹缺陷，使DLC表面变得更平滑。 关键词 ： 非平衡磁控溅射,  Ti添加类金刚石薄膜,  表面形     Abstract：Using an unbalanced magnetron sputtering, hydrogen-free titanium-doped diamond-like carbon (Ti-DLC) and hydrogen-free pure diamond-like carbon (DLC) were deposited. Sputtering from titanium target and graphitic targets simultaneously to form Ti-DLC coatings, the sputtering power of titanium target was varied so the titanium concentration in the Ti-DLC coatings could be controlled from 1.9 to 34at.%. The morphology, structure were investigated by Raman、XPS、XRD and AFM. Results show that all the Ti-DLC coatings have a similar Raman spectrum with pure DLC, but dropping titanium will cause a transform from sp3 configuration to sp2 configuration. Results also show that Ti exists in a form of TiC small crystallites in the DLC structure. Compare with Ti-DLC coatings, pure DLC coating was much smoother, but for some rough base surface, titanium dropping was benefit for getting a smoother coating surface. Key words： unbalanced magnetron sputtering    titanium-doped diamond-like carbon    morphology    structure 收稿日期: 2007-04-25      ZTFLH:  TB383   服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 聂朝胤 张碧云 谢红梅 44.8K 链接本文: https://www.ams.org.cn/CN/Y2007/V43/I11/1207 [1]Yang S,Li X,Renevier N M,Teer D G.Surf Coat Technol, 2001;142/144:85 [2]Narayan R J.Appl Surf Sci,2005;247:217 [3]Weng K W,Chert Y C,Lin T N,Wang D Y.Thin Solid Films,2006;515:932 [4]Kulikovsky V,Bohac P,Franc F,Deineka A,Vorlicek V, Jastrabik L.Diamond Relat Mater,2001;10:1076 [5]Fu Y H,Zhu X D,He J W,Yang S C.Tribology,2003;23: 463 (付永辉，朱晓东，何家文，Yong S C．摩擦学报，2003；23：463) [6]Siegal M P,Barbour J C,Provencio P N,Tallant D R, Friedmann T A.Appl Phys Lett,1998;73:759 [7]Siegal M P,Tallant D R,Provencio P N,Provencio D L, Overmyer D L,Simpson R L,Martine-Miranda L J.Appl Phys Lett,2000;76:3052 [8]Saitoh H.J Surf Finish Soc Jpn,2002;53:706 (斋藤秀俊．表面技术，2002；53：706) [9]Rusli,Yoon S F,Yang H,Ahn J,Huang Q F,Zhang Q, Guo Y P,Yang C Y,Teo E J,Wee A T S,Huan A C H. Thin Solid Films,1999;355/356:174 [10]Strondl C,Carvalho N M,de Hosson J Th M,van der Kolk G J.Surf Coat Technol,2003;162:288 [11]Yang B,Huang Z H,Gao H T,Fan X J,Fu D J.Surf Coat Technol,2007;201:6808 [12]Veprek S,Haussmann M,Reiprich S.Mater Res Soc Syrup Proc,1996;86/87:394 [13]MouraeSilva C W,Bronco J R T,Cavaleiro A.Thin Solid Films,2006;515:1063 [14]Pal S K,Jiang J C,Efstathios I.Meletis Surf Coat Tech- nol,2007;201:7917 [15]Baba K,Hatada R,Tanaka Y.Surf Coat Technol,2007; 201:8362 [16]Dekempeneer E,Van Acker K,Vercammen K,Meneve J, Neerinck D,Eufinger S,Pappaert W,Sercu M,Smeets J. Surf Coat Technol,2001;142-144:669 [17]Robertson J.Prog Solid State Chem,1991;21:199 [18]Hu YW,Li L H,CaiX,Chen Q L,Chu P K,Diamond Relat Mater,2007;16:181 [19]Wang P,Wang X,Xu T,Liu W M,Zhang J Y.Thin Solid Films,2007;515:68998 [1] 刘海霞, 陈金豪, 陈杰, 刘光磊. NaCl溶液腐蚀后304不锈钢的射流空蚀特征[J]. 金属学报, 2020, 56(10): 1377-1385. [2] 刘洋,向伟,王博宇. 脉冲离子束辐照对TiH2膜表面微观结构的影响[J]. 金属学报, 2013, 49(10): 1269-1274. [3] 时惠英 龙艳妮 蒋百灵 陈迪春. 打底层对铝合金表面GLC镀层组织和摩擦学特性的影响[J]. 金属学报, 2012, 48(8): 983-988. [4] 梁永煌 满瑞林. Al管表面有机杂化膜的制备及性能表征[J]. 金属学报, 2010, 46(12): 1522-1528. [5] 李健; 朱洁 . 恒电流电沉积法制备Cu-In薄膜的研究[J]. 金属学报, 2006, 42(6): 667-672 . [6] 张文魁; 黄辉; 甘永平 . Pd/Y薄膜在气态吸放氢过程中的表面形貌和可转换光学特性[J]. 金属学报, 2003, 39(9): 974-978 . [7] 武传松;L.Dorn. 熔滴冲击力对MIG焊接熔池表面形状的影响[J]. 金属学报, 1997, 33(7): 774-780. [8] 魏学军;李劲;周向阳;柯伟. 阳极电流对纯铜裂尖表面形变和总体形变影响的对比[J]. 金属学报, 1994, 30(21): 393-397. [9] 郭成言;後藤孝;平井敏雄. 钢表面化学气相沉积TiC晶体的择优取向[J]. 金属学报, 1992, 28(7): 85-89. [10] 康增桥;盖秀颖;李家宝;王中光. 残余应力和表面形态对60Mn疲劳性能的影响[J]. 金属学报, 1992, 28(6): 40-46. Viewed Full text Abstract Cited   Shared      Discussed