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金属学报    DOI: 10.11900/0412.1961.2024.00290
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集成电路芯片互连微凸点电迁移:从物理本质到可靠性提升
黄明亮,王胜博,尤海潮,刘厚麟,任婧,黄斐斐
大连理工大学 材料科学与工程学院 电子封装材料实验室 大连 116024
Electromigration of micro solder bumps in chip interconnections of integrated circuits: from physical nature to reliability improvement
HUANG Mingliang, WANG Shengbo, YOU Haichao, LIU Houlin, REN Jing, HUANG Feifei

Electronic Packaging Materials Laboratory, School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China

引用本文:

黄明亮 王胜博 尤海潮 刘厚麟 任婧 黄斐斐. 集成电路芯片互连微凸点电迁移:从物理本质到可靠性提升[J]. 金属学报, 10.11900/0412.1961.2024.00290.

全文: PDF(4969 KB)  
摘要: 随着先进封装技术向微型化、高性能方向发展,集成电路芯片锡基微凸点直径持续减小至微米尺度,通过单个凸点的电流密度随直径减小呈平方增加,其电迁移行为与机理研究对集成电路芯片互连可靠性评估与设计具有重要价值。本文归纳分析了芯片互连微凸点(焊点)电迁移现象的物理本质、主要影响因素和研究方法;系统综述了微焊点固-固电迁移过程中的“极性效应”、“反极性效应”和“两相分离”等电迁移行为特征与液-固电迁移过程中原子迁移、相析出和相溶解等电迁移行为特征;梳理评价了电迁移寿命的评估模型及修正;最后阐明了微焊点电迁移可靠性提升的方法,并展望了集成电路芯片互连锡基微凸点电迁移未来的研究方向和可靠性分析方法。
关键词 电子封装芯片互连微焊点电迁移可靠性    
Abstract
With advancements in miniaturization and performance in advanced packaging technology, the diameter of Sn-based microbumps continues to shrink to the micrometer scale. Consequently, the current density passing through each solder bump increases exponentially as the radius reduces. This emphasizes the critical need to understand the behaviors and mechanisms of electromigration (EM) for the reliability evaluation and design of chip interconnects in integrated circuits. This study systematically summarizes and analyzes the physical nature, key influencing factors and research methods related to the electromigration of Sn-based microbumps. The EM characteristics during the solid-solid EM, including the “polarity effect”, “reverse polarity effect” and “two-phase separation” are reviewed. Similarly, the EM behaviors during the liquid-solid EM, including atomic migration, phase segregation and phase dissolution, are systematically reviewed. The EM lifetime assessment models and their modifications are evaluated. Furthermore, this study summarizes methods to improve the EM reliability of Sn-based microbumps and outlines prospective research direc
Key wordselectronic packaging    chip interconnection    micro-bump    electromigration    reliability
收稿日期: 2024-08-20     
基金资助:国家自然科学基金项目;国家自然科学基金项目;中国博士后科学基金资助项目
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