柔性、可拉伸变形微型热电器件的设计与集成

doi:10.11900/0412.1961.2022.00171

金属学报

2024, Vol. 60

Issue (3): 348-356 DOI: 10.11900/0412.1961.2022.00171

研究论文

本期目录 | 过刊浏览

柔性、可拉伸变形微型热电器件的设计与集成

刘瑞¹^,², 于治², 赵洋², 李晓齐², 喻海龙², 何娟², 聂鹏程², 王春雨², 邰凯平²^,³(

), 刘畅²(

)

¹沈阳化工大学理学院沈阳 110142
²中国科学院金属研究所沈阳材料科学国家研究中心沈阳 110016
³辽宁冷芯半导体科技有限公司辽宁省集成电路热管理专业技术创新中心沈阳 110172

Design and Integration of Flexible and Stretchable Micro-Thermoelectric Devices

LIU Rui¹^,², YU Zhi², ZHAO Yang², LI Xiaoqi², YU Hailong², HE Juan², NIE Pengcheng², WANG Chunyu², TAI Kaiping²^,³(

), LIU Chang²(

)

¹College of Science, Shenyang University of Chemical Technology, Shenyang 110142, China
²Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
³Liaoning Professional Technology Innovation Center for Integrated Circuit Thermal Management, Liaoning Lengxin Semiconductor Technology Co. Ltd., Shenyang 110172, China

引用本文:

刘瑞, 于治, 赵洋, 李晓齐, 喻海龙, 何娟, 聂鹏程, 王春雨, 邰凯平, 刘畅. 柔性、可拉伸变形微型热电器件的设计与集成[J]. 金属学报, 2024, 60(3): 348-356.
Rui LIU, Zhi YU, Yang ZHAO, Xiaoqi LI, Hailong YU, Juan HE, Pengcheng NIE, Chunyu WANG, Kaiping TAI, Chang LIU. Design and Integration of Flexible and Stretchable Micro-Thermoelectric Devices[J]. Acta Metall Sin, 2024, 60(3): 348-356.

全文: PDF(2122 KB) HTML

摘要:

在能源匮乏、环境污染严重的今天，研发可循环利用、环境友好的新型能源材料与器件具有重要意义。热电材料可直接实现热能与电能的相互转换，为解决这一问题提供了新的途径。特别是，近年来由于柔性热电器件展现出自供电、可穿戴等优势，受到了人们的高度重视。本工作通过引入聚二甲基硅氧烷(polydimethylsiloxane，PDMS)基底，利用单壁碳纳米管(single-wall carbon nanotube，SWCNT)/Bi₂Te₃热电复合薄膜材料优异的热电性能和柔韧性，设计制作了一种可拉伸变形的三维拱形结构的微型热电发电器件。该器件充分利用薄膜材料面内最佳热电性能方向，通过器件内外温差获得热-电性能转换，在电极两端产生电势差，实现发电。该微型柔性热电器件在温差为4 K时，输出电压为4.8 mV，最大输出功率达2.6 × 10^-9 W，功率密度为3.9 × 10^-9 W/cm²，器件的最小弯曲半径为3 mm。这种微型柔性热电器件的制备工艺简单易行、成本低廉，为柔性热电薄膜发电器件的研制提供了新途径。

关键词 ： SWCNT/Bi₂Te₃热电复合薄膜, 可拉伸变形, 微型柔性热电器件

Abstract：

A miniature flexible thermoelectric generator with a stretchable three-dimensional (3D) arch structure is designed using polydimethylsiloxane (PDMS) as a substrate and the excellent thermoelectric properties and flexibility of single-wall carbon nanotube (SWCNT)/Bi₂Te₃ thermoelectric hybrid film. The device fully utilizes optimal in-plane thermoelectric performance direction of the film material and obtains electro-thermal conversion through temperature differences between the inside and outside of the device plane. Therefore, thermoelectric potential is generated at both ends of the electrode to achieve power generation. When the temperature difference was 4 K, the output voltage is 4.8 mV, the maximum output power is 2.6 × 10^-9 W, the power density is 3.9 × 10^-9 W/cm², and the minimum bending radius of the device can reach 3 mm. The fabrication process for this miniature flexible thermoelectric device is simple, feasible, and low-cost, providing a new avenue for developing flexible thermoelectric thin-film power generation devices.

Key words： SWCNT/Bi₂Te₃ thermoelectric hybrid film stretchable and deformable flexible thermoelectric device

收稿日期: 2022-04-17

ZTFLH:

TB383.2

基金资助:国家自然科学基金项目(52073290);国家自然科学基金项目(51927803);辽宁省杰出青年科学基金项目(2023JH6/100500004);辽宁省自然科学基金项目(2022-MS-011);沈阳市科技计划项目(23-407-3-23)

通讯作者: 邰凯平，kptai@imr.ac.cn，主要从事热电材料与器件的研究; 刘畅，cliu@imr.ac.cn，主要从事碳纳米管的制备、性能与应用探索的研究

Corresponding author: TAI Kaiping, professor, Tel: 18640320728, E-mail: kptai@imr.ac.cn; LIU Chang, professor, Tel: 18640219199, E-mail: cliu@imr.ac.cn

作者简介: 刘瑞，女，1996年生，硕士

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https://www.ams.org.cn/CN/10.11900/0412.1961.2022.00171 或 https://www.ams.org.cn/CN/Y2024/V60/I3/348

图1 薄膜型热电器件设计图和三维立体拱形热电薄膜器件设计图

图2 微型柔性热电器件制作流程图

图3 可拉伸变形的拱形聚二甲基硅氧烷(PDMS)基底的制作

图4 柔性、可拉伸变形微型热电器件实物图

图5 单壁碳纳米管(SWCNT)/Bi2Te3复合薄膜和SWCNT/Sb1.5Bi0.5Te3复合薄膜的XRD谱

图6 沉积时间为3600 s的SWCNT/Bi2Te3复合薄膜和沉积时间为2100 s的SWCNT/Sb1.5Bi0.5Te3复合薄膜的SEM像

图7 n型SWCNT/Bi2Te3复合薄膜与p型SWCNT/Sb1.5Bi0.5Te3复合薄膜的热电性能

图8 微型柔性热电器件的测试原理图

图9 微型柔性热电器件发电性能

图10 微型柔性热电器件的柔性测试图

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