EFFECTS OF Ta SEED LAYER ON THE MICROSTRUCTURE AND MAGNETIC PROPERTY OF Ni65Co35 FILMS

Acta Metall Sin

2006, Vol. 42

Issue (9): 979-982 DOI:

Research Articles

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EFFECTS OF Ta SEED LAYER ON THE MICROSTRUCTURE AND MAGNETIC PROPERTY OF Ni65Co35 FILMS

WANG Lijin; ZHANG Hui; TENG Jiao; ZHU Fengwu

北京科技大学材料科学与工程学院材料物理与化学系; 北京 100083

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WANG Lijin; ZHANG Hui; TENG Jiao; ZHU Fengwu. EFFECTS OF Ta SEED LAYER ON THE MICROSTRUCTURE AND MAGNETIC PROPERTY OF Ni65Co35 FILMS. Acta Metall Sin, 2006, 42(9): 979-982 .

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Abstract Ta(x nm)/Ni65Co35 (40 nm) bilayers films (x = 0, 1, 2, 3, 4, 5 nm) have been prepared by DC magnetron sputtering. The effects of the thickness and deposition rate of Ta seed layer on anisotropic magnetoresistance(AMR) and coercivity of Ni65Co35 (40 nm) layer were investigated.XRD and magneto-test showed that a suitable thickness and higher deposition rate of Ta layer could promote the formation of Ni65Co35 layer with (111) texture, and remarkably increase the AMR value of Ni65Co35 layer and the sensitivity of magnetic sensor element.

Key words: Ni65Co35 film Ta seed layer anisotropic magnetoresistance (AMR)

Received: 15 December 2005

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y2006/V42/I9/979

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