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| MAGNETIC PROPERTIES AND RELAXATION PROCESS OF AMORPHOUS CoFeNiNbSiB SOFT MAGNETIC FILMS |
| by LIU Yihua; MEI Liangmo; WANG Dexin; GUO Yicheng (Department of physics; Shandong University; Jinan)(Manuscript received 10 July; 1985; revised manuscript 10 January; 1986) |
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Cite this article:
by LIU Yihua; MEI Liangmo; WANG Dexin; GUO Yicheng (Department of physics; Shandong University; Jinan)(Manuscript received 10 July; 1985; revised manuscript 10 January; 1986). MAGNETIC PROPERTIES AND RELAXATION PROCESS OF AMORPHOUS CoFeNiNbSiB SOFT MAGNETIC FILMS. Acta Metall Sin, 1987, 23(5): 459-463.
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Abstract The preparing processes of amorphous CoFeNiNbSiB soft magnetic thin films using r. f. sputtering have been investigated systematically. It was found that high quality soft magnetic films can be obtained at low pressure Ar(0.5 Pa), and the properties of films are less influenced by the bias. After annealing in a rotating field, the initial permeability of films is not less than 3000, at the field up to 10 MHz, and they show a good frequency response! The structural relaxation process of amorphous films during annealing has been studied by means of resistance monitoring method. Four successive relaxation stages have been observed at high temperature.
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Received: 18 May 1987
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