Acta Metall Sin  1992, Vol. 28 Issue (5): 85-89    DOI:

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CORRELATION BETWEEN CONSTITUENT AND SPUTTERING RATE OF BINARY ALLOYS IN GLOW DISCHARGE LAMP

REN Jianshi;ZHANG Gongshu;WANG Zhenshu;LIU Gen;LIU Shenglin Institute of Metal Research; Academia Sinica; Shenyang; Shanghai University of Technology Correspondent senior engineer; Institute of Metal Research; Academia Sinica; Shenyang 110015

REN Jianshi;ZHANG Gongshu;WANG Zhenshu;LIU Gen;LIU Shenglin Institute of Metal Research; Academia Sinica; Shenyang; Shanghai University of Technology Correspondent senior engineer; Institute of Metal Research; Academia Sinica; Shenyang 110015. CORRELATION BETWEEN CONSTITUENT AND SPUTTERING RATE OF BINARY ALLOYS IN GLOW DISCHARGE LAMP. Acta Metall Sin, 1992, 28(5): 85-89.

Abstract References Related Articles Recommended Metrics Download:  PDF(416KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Investigation was made of the sputtering rate in glow discharge lamp with re-lation to constituent of 25 different specimens of 6 binary systems, namely, Cr-Fe, Bi-Sb,Cu-Zn, Ag-Cu, Al-Zn and Cd-Sn, by measuring mass loss after each sputtering under con-stant Ar pressure and voltage applied. The correlation, in general, between sputtering rate andconcentration of constituent of these non-intermetallic binary alloys obeys the hyperbolic lawunder steady state, yet may be approximately regarded as linear only on certain special condi-tion if the two components of the alloys with similar sputtering rates. Key words:  cathode sputtering      glow discharge      binary alloy      sputtering rate      Received:  18 May 1992      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1992/V28/I5/85 1 Boumans P W J M. Anal Chem, 1972; 44: 1219 2 任建世,赵惠林,张功抒.中国专利,88217038． 4,1988 3 Greene JE, Natarajan B R, Sequeda-Osorio F. J Appl Phys, 1978; 49: 417 4 任建世,张功杼.分析化学,1983;11:586 5 Pons-Corbeau J. Surf Interface Anal, 1985; 7: 169 6 Pons-Corbeau J. Surf Interface Anal, 1986; 9: 21 7 刘圣麟,张功杼,任建世,王桢枢.中国商检,1991;(116) : [1] WU Yucheng, GAO Zhiqiang, XU Guangqing, LIU Jiaqin, XUAN Haicheng, LIU Youhao, YI Xiaofei, CHEN Jingwu, HAN Peide. Current Status and Challenges in Corrosion and Protection Strategies for Sintered NdFeB Magnets[J]. 金属学报, 2021, 57(2): 171-181. [2] Wei XU,Xin LU,Yanxia DU,Qingyu MENG,Ming LI,Xuanhui QU. Corrosion Resistance of Ti-Fe Binary Alloys Fabricated by Powder Metallurgy[J]. 金属学报, 2017, 53(1): 38-46. [3] ZHANG Weiwen; ZOU Ganfeng; DENG Changning; WEI Xinzhao; XU Linkang;YU Ge)( Department Mechano-Electronic Engineering ; South China University of Technology; Guangzhou 510641)(Guangzhou Yongda Machninery Company; Guangzhou 511443)Correspondent: YU Ge; professor Tel: (020)87114547; E-mail: metrlab scut edu cn. INVESTIGATION OF PRODUCTION OF GRADIENT MATERIAL BY CONTINUOUS CASTING[J]. 金属学报, 1998, 34(6): 609-614. [4] REN Jianshi;ZHAO Huilin;ZHANG Gongshu Institute of Metal Research; Academia Sinica; Shenyang. OBSERVATION ON SPUTTERING SURFACE OF ALLOYS IN GLOW DISCHARGE[J]. 金属学报, 1989, 25(4): 148-150. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed