A Novel Method for Determining the Residual Stresses of Hard Coatings

Acta Metall Sin

2008, Vol. 44

Issue (1): 125-128 DOI:

Research Articles

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A Novel Method for Determining the Residual Stresses of Hard Coatings

Sheng-Sheng ZHAO;;;;;

中科院金属所

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Sheng-Sheng ZHAO. A Novel Method for Determining the Residual Stresses of Hard Coatings. Acta Metall Sin, 2008, 44(1): 125-128 .

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Abstract A new method was put forward to determine the residual stresses of hard coatings. A set of optical lever system was designed to measure accurately the curvature of the sample bended by the stresses of the films, and then the residual stress can be calculated. Through detecting the error of the measuring equipment and testing the residual stresses in (Ti,Al)N films deposited using by arc ion plating, the effectiveness of the method was exhibited.

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Received: 09 March 2007

ZTFLH:

TG115.222

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y2008/V44/I1/125

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