Raman Spectra of Diamond-Like Carbon Films Deposited by Vacuum Cathodic Arc

Acta Metall Sin

2004, Vol. 40

Issue (2): 220-224 DOI:

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Raman Spectra of Diamond-Like Carbon Films Deposited by Vacuum Cathodic Arc

LI Liuhe; WU Yongqin; CUI Xuming; ZHANG Haiquan; ZHANG Yanhua;;XIA Lifang;Paul K. Chu

School of Mechanical Engineering and Automation; Beijing University of Aeronautic and Astronautic; Beijing 100083

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LI Liuhe; WU Yongqin; CUI Xuming; ZHANG Haiquan; ZHANG Yanhua; XIA Lifang; Paul K. Chu. Raman Spectra of Diamond-Like Carbon Films Deposited by Vacuum Cathodic Arc. Acta Metall Sin, 2004, 40(2): 220-224 .

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Abstract The structures of diamond-like carbon (DLC) films deposited by vacuum arc evaporation with and without curve arc magnetic filter are studied and compared using Raman shifts. The Raman shifts are deconvolved into D peak and G peak with Gaussian-Lorentzion fitness. The effects of the deposition parameters such as bias voltage and bias current strength of curved magnetic fields on the DLC films structures are discussed. The results show that Ar gas pressure has not obvious effect on the formation of the DLC film; moderate bias current increases the sp3 content; the sp2 cluster can be increased for a too high substrate bias. The magnetic curved filter not only can remove the carbon macroparticles, but also can improve the sp3 content.

Key words: Raman spectrum diamond-like carbon film

Received: 21 February 2003

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	LI Liuhe
	WU Yongqin
	CUI Xuming
	ZHANG Haiquan
	ZHANG Yanhua
	XIA Lifang
	Paul K. Chu

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y2004/V40/I2/220

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