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Acta Metall Sin  1994, Vol. 30 Issue (19): 323-326    DOI:
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TRIBOLOGICAL PROPERTIES OF TiN FILM BY ION BEAM ASSISTED DEPOSITION
LIU Hanwei;CHEN Yuanru (Southwest Jiaotong University; Chengdu)ZHANG Xushou (Laboratory of Solid Lubrication; Lanzhou institute of Chemical Physics;Chinese Academy of Sciences; Lanzhou)
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LIU Hanwei;CHEN Yuanru (Southwest Jiaotong University; Chengdu)ZHANG Xushou (Laboratory of Solid Lubrication; Lanzhou institute of Chemical Physics;Chinese Academy of Sciences; Lanzhou). TRIBOLOGICAL PROPERTIES OF TiN FILM BY ION BEAM ASSISTED DEPOSITION. Acta Metall Sin, 1994, 30(19): 323-326.

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Abstract  XPS, AES and XRD show that the main composition of TiN film prepared by ion beam assisted deposition is TiN with fine grain size and slightly preferential orientation,except predominent TiO_2 on surface of film and a wide mixed region of Ti, Fe, N at interface between film and substrate. The tribological behaviour of the TiN film was tested on a ball/disc frictional device under stepwise loading and lubricating sliding. From P-v diagram, the enlargement of boundary lubrication region has been found. It seems that the existence of TiN film increases the load carrying capacity of substrate of Cr12MoV steel.
Key words:  ion beam assisted deposition      TiN film      sliding friction     
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