SURFACE ANALYSES OF NITROGEN ION IMPLANTED Ti6A14V ALLOY

Acta Metall Sin

1989, Vol. 25

Issue (3): 119-124 DOI:

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SURFACE ANALYSES OF NITROGEN ION IMPLANTED Ti6A14V ALLOY

ZHAO Guozhen;YU Jian;ZHANG Xiaozhong Shanghai Research Institute of Materials Tsinghua University

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ZHAO Guozhen;YU Jian;ZHANG Xiaozhong Shanghai Research Institute of Materials Tsinghua University. SURFACE ANALYSES OF NITROGEN ION IMPLANTED Ti6A14V ALLOY. Acta Metall Sin, 1989, 25(3): 119-124.

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Abstract The techniques for surface analysis including AES, XPS and SIMS wereemployed to study the chemical composition and bond valence of nitrogen ion im-planted surface of surgical implantation service alloy Ti6A14V. The depth of implant-ed nitrogen ions and the sputtering rate of argon beams were determined using pro-filometer. It was found that the combination of injected nitrogen ions with titaniumresulted in the formation of hard TiN particles and the profile of nitrogen concentra-tion approximately displayed gaussian distribution. The total depth of implantednitrogen is about 350nm and its maximum concentration appers in the depth ofabout 140nm from the surface, in which the concentration ratio of nitrogen to tita-nium may be up to 1.1.

Key words: Ti6Al4V nitrogen ion implantation surface analysis

Received: 18 March 1989

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1989/V25/I3/119

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