Acta Metall Sin  1984, Vol. 20 Issue (1): 111-116    DOI:

Current Issue | Archive | Adv Search |

ELLIPSOMETRIC ANALYSIS OF ION-IMPLANTED SURFACE LAYER ON METAL

SUI Senfang; CHEN Heming (Qinghua University; Beijing)(Manuscript received 5 February; 1982; revised manuscript 22 July; 1983)

SUI Senfang; CHEN Heming (Qinghua University; Beijing)(Manuscript received 5 February; 1982; revised manuscript 22 July; 1983). ELLIPSOMETRIC ANALYSIS OF ION-IMPLANTED SURFACE LAYER ON METAL. Acta Metall Sin, 1984, 20(1): 111-116.

Abstract References Related Articles Recommended Metrics Download:  PDF(707KB)  Export:  BibTeX | EndNote (RIS)       Abstract  An ellipsometric method is prcscnted for the analysis of the ion-implanted surface layer on metal. Experimental results indicate that the variation of the pseudo-imaginary part of the dielectric function can give the information about the transformation from the crystalline into amorphous state of the surface layer on rectal by ion implantation. Received:  18 January 1984      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1984/V20/I1/111 1 Adams, J.R.; Bashara, N.M., Surf. Sci., 49 (1975) , 441． 2 Schroeder, J.B.; Dieselman, H.D., J. Appl. Phys., 40 (1969) , 2559． 3 莫党;卢因诚;李旦晖;刘尚礼;卢武星,半导体学报,1(1980) ,198． 4 Cullis, A.G.; Poate, J.M., Appl. Phys. Lett., 28 (1976) , 314． 5 Grant, W.A., J. Vac. Sci. Technol., 15 (1978) , 1644． 6 隋森芳;吴秉芬;陈清明;陈鹤鸣,物理,11(1982) ,273． 7 半导体教研室表面钝化科研小组,西安交通大学学报,2(1974) ,No.3,17． 8 Vedam, K., Surf. Sci., 56 (1976) , 221 No related articles found! No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed