EFFECT OF D+ BEAM IRRADIATION ON Ti FILM

doi:10.3724/SP.J.1037.2010.00017

Acta Metall Sin

2010, Vol. 46

Issue (7): 810-813 DOI: 10.3724/SP.J.1037.2010.00017

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EFFECT OF D⁺ BEAM IRRADIATION ON Ti FILM

WANG Boyu¹⁾, XIANG Wei¹⁾, TAN Xiaohua¹⁾, DAI Jingyi¹⁾, CHENG Liang¹⁾, QIN Xiubo²⁾

1) Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900
2) Key Laboratory of Nuclear Analysis Techniques, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049

Cite this article:

WANG Boyu XIANG Wei TAN Xiaohua DAI Jingyi CHENG Liang QIN Xiubo. EFFECT OF D⁺ BEAM IRRADIATION ON Ti FILM. Acta Metall Sin, 2010, 46(7): 810-813.

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Abstract

Effect of the D⁺ ion beam on Ti film is studied by radiating the Ti films with different energy D⁺ beams on electrostatic accelerator. Slow positron annihilation spectroscopy and SEM are used to characterize the films. With the D⁺ beam energy increases, the extent of radiation damage and the surface ablation of Ti films increase. The maximum of radiation damage locates at 0.3 μm depth. The geometrical non-uniformity on original surface is the main reason for the ablation behavior on Ti films by inducing a selective ablation under radiation. Radiation damage and energy loss of D⁺ in Ti film are discussed in detail by the numerical simulation of the beam and the solid interaction. It shows that the maximum radiation damage is at 0.65 $\mu$m depth and energy loss of D⁺ beam in Ti films accords with the experimental observation.

Key words: D⁺ Ti film slow positron annihilation spectroscopy

Received: 08 January 2010

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Supported by Science Innovation Foundation of Institute of Electronic Engineering of China Academy of Engineering Physics (No.S20090801)

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https://www.ams.org.cn/EN/10.3724/SP.J.1037.2010.00017 OR https://www.ams.org.cn/EN/Y2010/V46/I7/810

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