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| 耐腐蚀磨损CrN/NbN涂层的沉积机制及缺陷控制 |
刘永康, 陆媛媛, 杨英( ), 刘兴光, 郑军, 张世宏( ) |
| 安徽工业大学 先进金属材料绿色制备与表面技术教育部重点实验室 马鞍山 243002 |
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| Deposition Mechanism and Defect Control of CrN/NbN Coatings with Excellent Tribocorrosion Performance |
LIU Yongkang, LU Yuanyuan, YANG Ying( ), LIU Xingguang, ZHENG Jun, ZHANG Shihong( ) |
| Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials, Ministry of Education, Anhui University of Technology, Ma'anshan 243002, China |
引用本文:
刘永康, 陆媛媛, 杨英, 刘兴光, 郑军, 张世宏. 耐腐蚀磨损CrN/NbN涂层的沉积机制及缺陷控制[J]. 金属学报, 2026, 62(4): 649-668.
Yongkang LIU,
Yuanyuan LU,
Ying YANG,
Xingguang LIU,
Jun ZHENG,
Shihong ZHANG.
Deposition Mechanism and Defect Control of CrN/NbN Coatings with Excellent Tribocorrosion Performance[J]. Acta Metall Sin, 2026, 62(4): 649-668.
| [1] |
Ghorbani A, Elmkhah H, Imantalab O, et al. The impact of mechanical post-treatment on the tribological and corrosion behavior of CrN/CrAlN coatings applied using the CAE-PVD technique [J]. Appl. Surf. Sci. Adv., 2023, 18: 100477
|
| [2] |
Vengesa Y, Fattah-Alhosseini A, Elmkhah H, et al. Investigation of corrosion and tribological characteristics of annealed CrN/CrAlN coatings deposited by CAE-PVD [J]. Ceram. Int., 2023, 49: 3016
|
| [3] |
Zhou S G, Qin B D, Wang S C, et al. Multilayer interfaces to achieve excellent corrosion and tribological performances for CrAlCN nanocomposite coating in the seawater [J]. Mater. Chem. Phys., 2023, 301: 127689
|
| [4] |
Kumar S, Maity S R, Patnaik L. Effect of tribological process parameters on the wear and frictional behaviour of Cr-(CrN/TiN) composite coating: An experimental and analytical study [J]. Ceram. Int., 2021, 47: 16018
|
| [5] |
Yu H Y, Liang W P, Miao Q, et al. Effect of shot peening pretreatment on the high-temperature tribological behaviours of a TaN coating prepared via double-cathode glow plasma alloying [J]. Surf. Coat. Technol., 2021, 427: 127825
|
| [6] |
Liu Z X, Li Y, Xie X H, et al. The tribo-corrosion behavior of monolayer VN and multilayer VN/C hard coatings under simulated seawater [J]. Ceram. Int., 2021, 47: 25655
|
| [7] |
González-Carmona J M, Triviño J D, Gómez-Ovalle Á, et al. Wear mechanisms identification using Kelvin probe force microscopy in TiN, ZrN and TiN/ZrN hard ceramic multilayers coatings [J]. Ceram. Int., 2020, 46: 24592
|
| [8] |
Er D, Azar G T P, Kazmanlı K, et al. The corrosion protection ability of TiAlN coatings produced with CA-PVD under superimposed pulse bias [J]. Surf. Coat. Technol., 2018, 346: 1
|
| [9] |
Panjan P, Drnovšek A, Gselman P, et al. Review of growth defects in thin films prepared by PVD techniques [J]. Coatings, 2020, 10: 447
|
| [10] |
Liu Y R, Li S Y, Zhou X H, et al. Enhanced anti-tribocorrosion property of a-C film under high hydrostatic pressure by high power pulsed magnetron sputter (HiPIMS) [J]. J. Mater. Res. Technol., 2024, 28: 3052
|
| [11] |
Creus J, Mazille H, Idrissi H. Porosity evaluation of protective coatings onto steel, through electrochemical techniques [J]. Surf. Coat. Technol., 2000, 130: 224
|
| [12] |
Kong J Z, Zhai Q W, Shen J J, et al. Role of atomic layer deposited TiO x N y interlayer in tribological and corrosion properties of CrN coating [J]. Surf. Coat. Technol., 2022, 429: 127981
|
| [13] |
Staszuk M, Reimann Ł, Pakuła D, et al. Investigations of TiO2/nano TiO2 bimodal coatings obtained by a hybrid PVD/ALD method on Al-Si-Cu alloy substrate [J]. Coatings, 2022, 12: 338
|
| [14] |
Liu Y R, Li S Y, Li H, et al. Controllable defect engineering to enhance the corrosion resistance of Cr/GLC multilayered coating for deep-sea applications [J]. Corros. Sci., 2022, 199: 110175
|
| [15] |
Wang D S, Hu M, Jiang D, et al. The improved corrosion resistance of sputtered CrN thin films with Cr-ion bombardment layer by layer [J]. Vacuum, 2017, 143: 329
|
| [16] |
Wan Z X, Zhang T F, Lee H B R, et al. Improved corrosion resistance and mechanical properties of CrN hard coatings with an atomic layer deposited Al2O3 interlayer [J]. ACS Appl. Mater. Interfaces, 2015, 7: 26716
|
| [17] |
Lin K F, Chang Y C, Chang S H, et al. Improving the corrosion and wear resistance of CoCrNiSi0.3 medium-entropy alloy by magnetron sputtered (CrN/Cr) x multilayer films [J]. Surf. Coat. Technol., 2024, 478: 130407
|
| [18] |
Shi X W, Zhao Y M, Gao X, et al. Anti-corrosive yet color-tunable AlN/Si multilayer hard coatings on 304 stainless steel by magnetron sputtering [J]. Ceram. Int., 2024, 50: 1166
|
| [19] |
Noori M, Atapour M, Ashrafizadeh F, et al. Nanostructured multilayer CAE-PVD coatings based on transition metal nitrides on Ti6Al4V alloy for biomedical applications [J]. Ceram. Int., 2023, 49: 23367
|
| [20] |
Guo H X, Sun Q S, Zhou D P, et al. Erosion behavior of CrN, CrAlN and CrAlN/CrN multilayer coatings deposited on Ti6Al4V [J]. Surf. Coat. Technol., 2022, 437: 128284
|
| [21] |
Ma F L, Li J L, Zeng Z X, et al. Structural, mechanical and tribocorrosion behaviour in artificial seawater of CrN/AlN nano-multilayer coatings on F690 steel substrates [J]. Appl. Surf. Sci., 2018, 428: 404
|
| [22] |
Wang T, Zhang G J, Jiang B L. Comparison in mechanical and tribological properties of CrTiAlMoN and CrTiAlN nano-multilayer coatings deposited by magnetron sputtering [J]. Appl. Surf. Sci., 2016, 363: 217
|
| [23] |
Cai F, Zhou Q, Chen J K, et al. Effect of inserting the Zr layers on the tribo-corrosion behavior of Zr/ZrN multilayer coatings on titanium alloys [J]. Corros. Sci., 2023, 213: 111002
|
| [24] |
Ortíz C H, Hernandez-Renjifo E, Caicedo J C. Study of corrosion protection through the implementation of TiC/TiSiCN multilayer coatings [J]. Mater. Chem. Phys., 2024, 315: 128821
|
| [25] |
Chen Y M. Study on microstructure regulation and strengthening mechanism of nano-multilayer ceramic coatings [D]. Beijing: University of Science and Technology Beijing, 2023
|
| [25] |
陈彦梦. 纳米多层陶瓷涂层的微观结构调控及强化机制研究 [D]. 北京: 北京科技大学, 2023
|
| [26] |
Wang D, Lin S S, Yang Z, et al. Failure mechanisms of CrN and CrAlN coatings for solid particle erosion resistance [J]. Vacuum, 2022, 204: 111313
|
| [27] |
Ji C C, Guo Q Q, Li J P, et al. Microstructure and properties of CrN coating via multi-arc ion plating on the valve seat material surface [J]. J. Alloys Compd., 2022, 891: 161966
|
| [28] |
Ding J C, Zhang T F, Wang Q M, et al. Microstructure and mechanical properties of the Cr-Mo-Si-N nanocomposite coatings prepared by a hybrid system of AIP and HiPIMS technologies [J]. J. Alloys Compd., 2018, 740: 774
|
| [29] |
Guan X Y, Wang Y X, Zhang G G, et al. Microstructures and properties of Zr/CrN multilayer coatings fabricated by multi-arc ion plating [J]. Tribol. Int., 2017, 106: 78
|
| [30] |
Panjan P, Čekada M, Panjan M, et al. Growth defects in PVD hard coatings [J]. Vacuum, 2009, 84: 209
|
| [31] |
Jasempoor F, Elmkhah H, Imantalab O, et al. Improving the mechanical, tribological, and electrochemical behavior of AISI 304 stainless steel by applying CrN single layer and Cr/CrN multilayer coatings [J]. Wear, 2022, 504-505: 204425
|
| [32] |
Guan X Y, Wang Y X, Xue Q J, et al. Toward high load bearing capacity and corrosion resistance Cr/Cr2N nano-multilayer coatings against seawater attack [J]. Surf. Coat. Technol., 2015, 282: 78
|
| [33] |
Abusuilik S B, Inoue K. Effects of intermediate surface treatments on corrosion resistance of cathodic arc PVD hard coatings [J]. Surf. Coat. Technol., 2013, 237: 421
|
| [34] |
Guan X Y, Wang Y X, Zhang G G, et al. Effects of intermediate Ar plasma treatments on CrN coating microstructures and property evolutions [J]. Surf. Interface. Anal., 2017, 49: 323
|
| [35] |
Purandare Y P, Robinson G L, Ehiasarian A P, et al. Investigation of high power impulse magnetron sputtering deposited nanoscale CrN/NbN multilayer coating for tribocorrosion resistance [J]. Wear, 2020, 452-453: 203312
|
| [36] |
Biswas B, Purandare Y, Khan I, et al. Effect of substrate bias voltage on defect generation and their influence on corrosion and tribological properties of HIPIMS deposited CrN/NbN coatings [J]. Surf. Coat. Technol., 2018, 344: 383
|
| [37] |
Hovsepian P E, Ehiasarian A P, Purandare Y P, et al. Novel HIPIMS deposited nanostructured CrN/NbN coatings for environmental protection of steam turbine components [J]. J. Alloys Compd., 2018, 746: 583
|
| [38] |
Ramadoss R, Kumar N, Dash S, et al. Wear mechanism of CrN/NbN superlattice coating sliding against various counterbodies [J]. Int. J. Refract. Met. Hard Mater., 2013, 41: 547
|
| [39] |
Huang W, Zalnezhad E, Musharavati F, et al. Investigation of the tribological and biomechanical properties of CrAlTiN and CrN/NbN coatings on SST 304 [J]. Ceram. Int., 2017, 43: 7992
|
| [40] |
Chen M H, Ding J C, Kwon S H, et al. Corrosion resistance and conductivity of NbN-coated 316L stainless steel bipolar plates for proton exchange membrane fuel cells [J]. Corros. Sci., 2022, 196: 110042
|
| [41] |
Lao J J, Kong M, Zhang H J, et al. Growth structure and mechanical properties of TiN/SiC nano-multilayers [J]. Acta Phys. Sin., 2004, 53: 1961
|
| [41] |
劳技军, 孔 明, 张惠娟 等. TiN/SiC纳米多层膜的生长结构与力学性能 [J]. 物理学报, 2004, 53: 1961
|
| [42] |
Chen Y M, Guo T, Pang X L, et al. Formation of high-density stacking faults in ceramic films induced by Ti transition layer [J]. Scr. Mater., 2022, 211: 114496
|
| [43] |
Zhang H, He Y Z, Pan Y, et al. Thermally stable laser cladded CoCrCuFeNi high-entropy alloy coating with low stacking fault energy [J]. J. Alloys Compd., 2014, 600: 210
|
| [44] |
Shin C S, Kim Y W, Hellgren N, et al. Epitaxial growth of metastable δ-TaN layers on MgO(001) using low-energy, high-flux ion irradiation during ultrahigh vacuum reactive magnetron sputtering [J]. J. Vac. Sci. Technol., 2002, 20A: 2007
|
| [45] |
Huang Y, Chen Z, Wagner A, et al. High density of stacking faults strengthened TaN/TiN multilayer [J]. Acta Mater., 2023, 255: 119027
|
| [46] |
Yu H, Bahadori M, Thompson G B, et al. Understanding dislocation slip in stoichiometric rocksalt transition metal carbides and nitrides [J]. J. Mater. Sci., 2017, 52: 6235
|
| [47] |
Araujo J A, Giorjão R A R, Bettini J, et al. Modeling intrinsic residual stresses built-up during growth of nanostructured multilayer NbN/CrN coatings [J]. Surf. Coat. Technol., 2016, 308: 264
|
| [48] |
Fang W, Chen J K, Cai F, et al. Surface stress release in AlCrN coatings determined by synchrotron radiation multi-reflection grazing-incidence X-ray diffraction [J]. Thin Solid Films, 2023, 787: 140142
|
| [49] |
Cedeño-Vente M L, Manríquez J, Mondragón-Rodríguez G C, et al. Application of a transmission line model to evaluate the influence of structural defects on the corrosion behavior of arc-PVD CrN coatings [J]. Ceram. Int., 2021, 47: 20885
|
| [50] |
Yang Y, Wang F, Wu Y D, et al. The corrosive wear behavior of Cr/NiCrN multilayer coatings with various cycle periods [J]. Surf. Technol., 2021, 50: 301
|
| [50] |
杨 英, 王 芳, 巫业栋 等. 不同循环周期Cr/NiCrN多层涂层腐蚀磨损行为 [J]. 表面技术, 2021, 50: 301
|
| [51] |
Chu X, Wong M S, Sproul W D, et al. Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films [J]. J. Mater. Res., 1999, 14: 2500
|
| [52] |
Kao C M, Lee J W, Chen H W, et al. Microstructures and mechanical properties evaluation of TiAlN/CrSiN multilayered thin films with different bilayer periods [J]. Surf. Coat. Technol., 2010, 205: 1438
|
| [53] |
Zhang S, Sun D E, Fu Y Q, et al. Toughening of hard nanostructural thin films: A critical review [J]. Surf. Coat. Technol., 2005, 198: 2
|
| [54] |
Kong W C, Yu Z, Hu J. Electrochemical performance and corrosion mechanism of Cr-DLC coating on nitrided Ti6Al4V alloy by magnetron sputtering [J]. Diam. Relat. Mater., 2021, 116: 108398
|
| [55] |
Park H S, Kappl H, Lee K H, et al. Structure modification of magnetron-sputtered CrN coatings by intermediate plasma etching steps [J]. Surf. Coat. Technol., 2000, 133-134: 176
|
| [56] |
Liu Y K, Yang Y, Liu X G, et al. Tribocorrosion of CrN coatings on different steel substrates [J]. Surf. Coat. Technol., 2024, 484: 130829
|
| [57] |
Liu L M, Zheng H, Dong M P, et al. Effect of bias voltage on the tribocorrosion performance of TiAlSiN coatings on FH790 steel by arc ion plating [J]. Surf. Coat. Technol., 2023, 454: 129177
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