金属学报  1998, Vol. 34 Issue (3): 313-318

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多晶沉积薄膜生长过程中织构演变的模拟研究

王沿东;刘沿东;徐家桢;梁志德

东北大学材料科学与工程系;沈阳;110006;东北大学材料科学与工程系;沈阳;110006;东北大学材料科学与工程系;沈阳;110006;东北大学材料科学与工程系;沈阳;110006

COMPUTER SIMULATION ON TEXTURE EVOLUTION OF POLYCRYSTALLINE THIN FILMS DURING GRAIN GROWTH

WANG Yandong; LIU Yandong; XU Jiachen; LIANG Zhide(Department of Materials Science and Engineering; Northeastern University;Shenyang 110006)

王沿东;刘沿东;徐家桢;梁志德. 多晶沉积薄膜生长过程中织构演变的模拟研究[J]. 金属学报, 1998, 34(3): 313-318.
, , , . COMPUTER SIMULATION ON TEXTURE EVOLUTION OF POLYCRYSTALLINE THIN FILMS DURING GRAIN GROWTH[J]. Acta Metall Sin, 1998, 34(3): 313-318.

摘要 参考文献 相关文章 Metrics 全文: PDF(519 KB)   摘要: 将织构组态熵的概念应用于沉积多晶薄膜织构演变的模拟研究，考虑薄膜沉积过程中晶体表面能各向异性及应变能各向异性的变化，建立了沉积薄膜晶体择优生长的定量模型；模拟了Al多晶薄膜沉积过程中晶体的生长规律，分析了织构演变的主要微观物理因素. 关键词 ： 多晶薄膜,  织构演变,  组态熵     Abstract：The concept of texture configuration entropy is introduced into the computer simulation on texture evolution of polycrystalline films. The grain orientation distribution in thin films is quantitatively determined by a new simple model. As an example, inverse pole figures of polycrystalline aluminum thin films are simulated by considering the change of texture configuration entropy and another orientation dependent driving forces during grain growth, such as surface energy and strain energy. The physical mechanisms affecting the texture evolution of polycrystalline thin films are discussed. Key words： polycrystalline thin film    texture evolution    configuxation entropy 收稿日期: 1998-03-18      基金资助:国家自然科学基金!59672020;;辽宁省科学技术委员会资助 服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 王沿东 刘沿东 徐家桢 梁志德 44.8K 链接本文: https://www.ams.org.cn/CN/      或      https://www.ams.org.cn/CN/Y1998/V34/I3/313 1Carel R, Thompson C V, Frost H J. Acta Mater, 1996; 44: 2479 2Waner F, Lamm L, Deparis D. Textures Microstruct, l995; 23: 249 3Li D Y, Szpunar J. Mater Sci Forum, 1994; 157-162: 1827 4Liu Y D, Wang Y D, Xu J Z, Hu X T. In: Liang Zhide, Zuo Liang eds., Proc 11th Int Coof onTedure of Materiais (ICOTOM-11), Vol.II, Xi'an, 1996: 1165 5Wang F, Xu J Z, Liang Z D. Pme 9th Int Coof on Textures of Materiale(JCOTOM-8), TheMetallurgical Society, Santa Fe, USA, 1987: 110 6王沿东,徐家桢金属学报,1995;31:B550(Wang Yandong, XU Jiazhen. Acta Metall Sin, 1995; 31: B550) 7Wang Y D, Liu Y D, Xu J Z, Liang Z D. J Appl Phys, 1996; 79: 7376 8Wang Y D, Vadon A, Heizmann J J, Xu J Z. Scr Mater, 1996; 35: 905 9陈仁烈统计物理引论北京:人民教育出版社,1959:104(Chen Renlie. The Intnduction Of Statisticnl Physics. Beijing: People's Education Press, 1959: 104) 10Mackenzie J K, Moore A J W, Nicholas J F. i Phys Chem Solids, 1962; 23: 185 11Baskes M I. Phys Rev, 1992; B46: 2727 12Daw M S, Baskes M I. Phys Rev Lett, 1983, 50: 1285 13Klokholm E, Berry B S. J Eletrochem Soc, 1968;115: 823 14Bassett G A, Menter J W, Bashley D W. Proc R Soc London, 1958; A246: 345 15Toth L S, Gilormini P, Jonas J J. Acta Metall, 1988; 36: 3077 16Braun J, Sambridge M. Nature, 1995; 376: 6542 17Li D Y, ffecaniere C, Das S, Szpunar J A. Mater Sci Forvm, 1994; 157-162: 555 [1] 高钰璧, 丁雨田, 陈建军, 许佳玉, 马元俊, 张东. 挤压态GH3625合金冷变形过程中的组织和织构演变[J]. 金属学报, 2019, 55(4): 547-554. [2] 张进修; 熊小敏 . 内耗频谱仪的应用及内耗频率峰机理的探讨[J]. 金属学报, 2003, 39(11): 1127-1132 . Viewed Full text Abstract Cited   Shared      Discussed