COMPOSITION OPTIMIZATION OF Al-Mg-B THIN FILM PROPERTIES PREPERAED BY MAGNETRON SPUTTERING

QU Wen-Tiao; WU Ai-Min; WU Tie-Ling; BO Yi-Zhen; JIANG Xin

doi:10.3724/SP.J.1037.2010.00712

Acta Metall Sin >

2011 , Vol. 47 >Issue 5: 628 - 633

DOI: https://doi.org/10.3724/SP.J.1037.2010.00712

论文

COMPOSITION OPTIMIZATION OF Al-Mg-B THIN FILM PROPERTIES PREPERAED BY MAGNETRON SPUTTERING

QU Wen-Tiao ,
WU Ai-Min ,
WU Tie-Ling ,
BO Yi-Zhen ,
JIANG Xin

Expand

1) School of Materials Science and Engineering, Faculty of Mechanical Engineering and Materials Energy, Dalian University of Technology, Dalian 116024
2) Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024
3) School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024
4) Institute of Materials Engineering, University of Siegen, Siegen 57076

Received date: 2010-12-30

Revised date: 2011-01-17

Online published: 2011-05-11

Supported by

Supported by the Fundament Research Funds for the Central Universities (No.DUT10JN08)

Fold

Abstract

Aluminum magnesium boron ternary boride (AlMgB₁₄) possesses high hardness, high-temperature oxidation resistance, high temperature corrosion resistance, low density, low friction and other excellent properties, and could be widely used in tool, mold, micro-mechanical manufacture and aerospace, et al. In this paper, Al-Mg-B films have been prepared by multi-target (high pure aluminum, magnesium and boron targets) magnetron sputtering on the silicon (100) substrate at room temperature. The films with an atomic ratio of Al∶Mg∶B=1∶1∶14 were obtained by controlling the sputtering power and the volume ratio of Al/Mg co-target. X-ray diffraction (XRD) and High resolution transmission electron microscopy (HR-TEM) test results show that all the as-deposited films are amorphous. The X-ray photoelectron spectroscopy (XPS) results showe that there are some B-B and Al-B single bond in the as--deposited films, and the Fourier transform infrared spectroscopy (FTIR) tests indicate further that the films possess B₁₂ icosahedra structure. The hardness of the films as shown by nano indentor test will be increasing with the increase of content of B around B-AlMg isoelectronic line and close to boron--rich side, and up to 32 GPa with low friction coefficients of 0.06-0.08.

Key words： magnetron sputtering; Al-Mg-B film; hardness; B₁₂ icosahedra structure

Cite this article

QU Wen-Tiao , WU Ai-Min , WU Tie-Ling , BO Yi-Zhen , JIANG Xin . COMPOSITION OPTIMIZATION OF Al-Mg-B THIN FILM PROPERTIES PREPERAED BY MAGNETRON SPUTTERING[J]. Acta Metall Sin, 2011 , 47(5) : 628 -633 . DOI: 10.3724/SP.J.1037.2010.00712

References

[1] Matkovich V I, Economy J. Acta Crystallogr, 1970; 26B: 616

[2] Wang W H. J Non–Cryst Solids, 2005; 351: 1481

[3] Tian Y, Constant A, Lo C C H, Anderegg J W, Russell A M, Snyder J E, Molian P. J Vac Sci Technol, 2003; 21A: 1055

[4] Higashi W, Ito T. J Less Common Met, 1983; 92: 239

[5] Pellegrino J L, Margolis N, Justiniano M, Miller M, Thedki A. Energy Use, Loss and Opportunities Analysis: U.S. Manufacturing & Mining. U.S. Department of Energy’s Industrial Technologies Program, 2004.12. http://www1.eere.energy.gov/industry/intensiveprocesses/pdfs/energy use loss opportunities analysis.pdf

[6] Cook B A, Harringa J L, Lewis T L, Russell A M. Scr Mater, 2000; 42: 597

[7] Tian Y, Bastawros A F, Lo C C H, Constant A P, Russell A M, Cook B A. Appl Phys Lett, 2003; 83: 2781

[8] Li Z G, Miyake S. Acta Metall Sin, 2010; 46: 13

(李铸国, 三宅正司. 金属学报, 2010; 46: 13)

[9] Tian Y, WomackM, Molian P, Lo C C H, Anderegg J W, Russell A M. Thin Solid Films, 2002; 418: 129

[10] Fjellstedt J, Jarfors A E W, Svendsen L. J Alloys Compd, 1999; 283: 192

[11] Hill J M, Johnston D C, Cook B A, Harringa J L, Russell A M. J Magn Magn Mater, 2003; 265: 23

[12] Lowther J E. Physica, 2002; 322B: 173

[13] Cherukuri R, Womack M, Molian P, Russell A M, Tian Y. Surf Coat Technol, 2002; 155: 112

[14] Roberts D J, Zhao J. F, Munir Z A. Int J Refract Met Hard Mater, 2009; 27: 556

[15] Erdemir A, Bindal C, Fenske G R. Appl Phys Lett, 1996; 68: 1637

[16] Bindal C, Erdemir A. Appl Phys Lett, 1996; 68: 923

Options

Outlines

模态框（Modal）标题

Abstract

Cite this article

References