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THE INFLUENCE OF ION BEAM BOMBARDMENT TO THE TRIBOLOGICAL PERFORMANCE OF MULTILAYER FILM |
ZHANG Wei;XUE Qunji;ZHANG Xushou(Laboratory of Solid Lubrication; Lanzhou Institute of Chemical Physics; The Chinese Academy of Sciences;Lanzhou 730000) |
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Cite this article:
ZHANG Wei;XUE Qunji;ZHANG Xushou(Laboratory of Solid Lubrication; Lanzhou Institute of Chemical Physics; The Chinese Academy of Sciences;Lanzhou 730000). THE INFLUENCE OF ION BEAM BOMBARDMENT TO THE TRIBOLOGICAL PERFORMANCE OF MULTILAYER FILM. Acta Metall Sin, 1997, 33(11): 1165-1170.
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Abstract Ni/Cr multilayer film was prepared by the way of Ne+ ion beam mixing. The distribution of elements and phase structure in Ni/Cr multilayer film were investigated using Auger electron spectroscopy sputtering depth profiles and X-ray diffraction analysis. The microhardness and tribological properties of multilayer film were measured. The results showed that Ni/Cr ion beam mixing multilayer film had high microhardness and anti-wear property compared with that of Ni/Cr multilayer film without ion beam bombardment. The high anti-wear property of ion beam mixing Ni/Cr multilayer film was attributed to the change of microstructure of the multilayer film and the dispersed chromium carbide microcrystals moved to the interfaces of multilayer film.
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Received: 18 November 1997
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1SudarshanTS著,范王殿译.表面改性技术工程师指南.北京:清华大学出版社,1992:1 2HuangRF,BangertH,WenllLS,GuoLP,GongJ,YuBH.SurfCoatTechnol,1992;50:97 3RuffAW,LashmoreDS.In:LudemaKC,BayerRGeds,WearofMaterials-1991,NewYork:ASME,1991:137 4SubramanianC,StraffordKN.Wear,1993;165:85 5ZieglerJF,BiersackJP,LithmackV.TheStoppingandRangeofIonsinSolidsVol.1,NewYork:Pergamon,1985:41 6JCPDSCard6-0694 7CarterG.RadiatEffLett,1979;43:193 |
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