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Acta Metall Sin  2007, Vol. 43 Issue (11): 1145-1147     DOI:
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Microstructure and Thermal Stability of CuSiN Self--Aligned Layerin Advanced Copper Interconnect Multilayer Films
LIU Bo; TANG Wenjin; SONG Zhongxiao; XU Kewei
State key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University
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LIU Bo; TANG Wenjin; SONG Zhongxiao; XU Kewei. Microstructure and Thermal Stability of CuSiN Self--Aligned Layerin Advanced Copper Interconnect Multilayer Films. Acta Metall Sin, 2007, 43(11): 1145-1147 .

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Abstract  A CuSiN self-aligned layer with 4nm thickness was synthesized using RF-plasma-enhanced chemical vapor deposition system. The microstructure of Si/SiO2/TaN/Ta/Cu(CuSiN)/SiC:H/SiOC:H multi-layer stacks were investigated by using high-resolution transmission electron microscopy, energy-dispersive spectroscopy, and X-ray diffraction . The result indicates that the thermal stability of the interface of Cu/SiC:H dielectric barriers can be improved by introducing CuSiN self-aligned layer. This is attributed to its suppress copper or vacancy diffusion along the interface and into SiC:H/SiOC:H dielectric film.
Key words:  copper interconnects      self-aligned CuSiN      thermal reliability      barrier layers      
Received:  26 March 2007     
ZTFLH:  TN406  

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https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2007/V43/I11/1145

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