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Acta Metall Sin  2010, Vol. 46 Issue (1): 34-40    DOI:
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STUDY ON W GRADED DOPING DLC COMPOSITE FILMS WITH MULTICOMPONENT TRANSITION LAYER
YANG Yiyong; PENG Zhijian; FU Zhiqiang; WU Sudong; CHEN Xinchun; WANG Chengbiao
School of Engineering and Technology; China University of Geosciences; Beijing 100083
Cite this article: 

YANG Yiyong PENG Zhijian FU Zhiqiang WU Sudong CHEN Xinchun WANG Chengbiao. STUDY ON W GRADED DOPING DLC COMPOSITE FILMS WITH MULTICOMPONENT TRANSITION LAYER. Acta Metall Sin, 2010, 46(1): 34-40.

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Abstract  

W graded doping diamond-like carbon (DLC) composite films with multicomponent transition layer were deposited onto silicon, high speed steel and/or stainless steel wafers using ion beam assisted mid-frequency unbalanced magnetron sputtering technique, and the influences of W target current on the composition, structure and properties of the DLC films were investigated. With increasing W target current, the contents of W and its carbides in the films increase, but the contents of sp3 structure decrease. Although there might be some metal droplets on the surface of the as-prepared samples, the distribution of each element is basically homogenous over the whole surface, and the roughness of sample keeps quite low value, which is in the range of 7.56-15.8 nm. The nanohardness (H), elastic modulus (E), and their ratio, H/E, increase with increasing W target current. The critical loads in scratch test of the as-prepared samples increase with the increase of W target current and are in the range of 80-100 N, indicating very strong adhesions between the films and substrates. Under ambient circumstance, the friction coefficients of the coated samples increase but the wear rates decrease obviously.

Key words:  composite coating technology      diamond-like carbon (DLC) film      W doping, tribological property     
Received:  06 July 2009     
ZTFLH: 

TB43

 
Fund: 

Supported by Key International Cooperation Project, Ministry of Science and Technology, China (No.{\footnotesize\it 2006DFB51260}) and the Tribology Science Fund of State Key Laboratory of Tribology in Tsinghua University

URL: 

https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2010/V46/I1/34

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