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| Surface Alloying Of Al Ion Implantation Into Fe Target At Elevated Temperature |
| CHEN Tao; CHANG Haiwei; LEI Mingkai |
| Department of Materials Engineering; Dalian University of Technology; Dalian 116024 |
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Cite this article:
CHEN Tao; CHANG Haiwei; LEI Mingkai. Surface Alloying Of Al Ion Implantation Into Fe Target At Elevated Temperature. Acta Metall Sin, 2005, 41(4): 417-420 .
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Abstract Surface alloying of Al ion implantation into Fe target with an ion
energy of 120 keV has been investigated at the implantation temperatures
of 250 and 500℃. The Al concentration--depth profiles and structure
changes on the implanted Fe surface were determined by Rutherford
backscattering spectroscopy (RBS) and X--ray diffraction (XRD),
respectively. It is shown that at a dose of 1x1017ions cm-2,
the Al ion implantation depths are 180 and 200 nm at the substrate
temperatures of 250 and 500℃, respectively, while both the Al peak
concentrations are 10% (atomic fraction). The intermetallic
Al13Fe4 was formed at the temperatures of 250 and 500℃, the
oxide AlFeO3 phase was also detected due to the contaminant oxygen.
The model of effective heat formation was successfully adopted to
interpret the intermetallics formation during Al ion implantation
into Fe target at elevated temperature. The calculation results of
concentration--depth profiles by using the mass transfer model are
consistent with the experimental results.
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Received: 26 May 2004
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