Acta Metall Sin  1993, Vol. 29 Issue (3): 90-96    DOI:

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EFFECTS OF TEMPERATURE RISE IN METAL DURING HIGH CURRENTION-IMPLANTATION

TIAN Renhe;GU Yongti;LU Wuxing;LIN Wenlian;ZHANG Tonghe;ZHANG Huixing Institute of Low Energy Nuclear Plysics; Beijing Normal University associate professor;Institute of Low Energy Nuclear Physics;Beijing Normal University; Beijing 100875

TIAN Renhe;GU Yongti;LU Wuxing;LIN Wenlian;ZHANG Tonghe;ZHANG Huixing Institute of Low Energy Nuclear Plysics; Beijing Normal University associate professor;Institute of Low Energy Nuclear Physics;Beijing Normal University; Beijing 100875. EFFECTS OF TEMPERATURE RISE IN METAL DURING HIGH CURRENTION-IMPLANTATION. Acta Metall Sin, 1993, 29(3): 90-96.

Abstract References Related Articles Recommended Metrics Download:  PDF(576KB)  Export:  BibTeX | EndNote (RIS)       Abstract  From solving the nonlinear equation of thermal conduction by using the finitedifference method,the effects of temperature rise in metals during high currention-implantation have been calculated. Curves of temperature rises, curves of profile temper-ature distributions, and dependences of sample surface temperature upon ion energies,doserates, target temperatures, and sample thicknesses are obtained. The processes of temperaturerise in pulsed and scanning ion-implantations are computed as well, and the temperaturefluctuations in them are discussed also. Key words:  steel TBA      ion-implantation      non-linear thermal conduction      numerical calculation      Received:  18 March 1993      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1993/V29/I3/90 1 Parry P D. J Vac Sci Technol, 1976; 13: 622 2 Parry P D. J Vac Sci Technol, 1978; 15: 111 3 Mack M E. In: Ryssel H. Glawischnig H eda., Ion Implantation; Equipment and Techniques, Berlin: Springer-Yerlag, 1983: 221 4 Smith T C. In: Ryssel H, Glawischnig H eds., Ion Implantation; Equipment and Techniques. Berlin: Springer-Yerlag, 1983: 196 5 Lindhard J, Scharff M. Phys Rev, 1961; 124: 128 6 Brice D K. Ion Implantation Range and Energy Deposition Distribution, Vol. Ⅰ, New York: IFI/Plenum Data Company, 1975: 571 7 Wiebelt J A. Engineering radiation Heat Transfer. New York: Holt, Rinehart and Winston, 1966: 74 8 西格尔 R,等.热辐射传热,第6-8章.北京:科学出版社,1990 9 秦元勋等.计算物理学.成都:四川科学技术出版社,1984:30 10 Touloukian Y S. Thermophysical Properties of Matter, Vol. T, New York: Plenum, 1970: 339 11 Adler R J. Picraux S T. Nucl Instrum Methods Phys Res, 1985: B6: 123 [1] LI Baokuan; HE Jicheng; LU Zhongwu (Northeast University of Technology; Shenyang). MATHEMATICAL SIMULATION ON THREE DIMENSIONAL FLOW IN OFF-CENTER GAS STIRRED BATHS[J]. 金属学报, 1992, 28(11): 47-53. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed