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Acta Metall Sin  1984, Vol. 20 Issue (4): 358-361    DOI:
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TRANSITION FROM CRYSTALLINE Al TO AMORPHOUS Al_2O_3 BY O~+-IMPLANTATION
SUN Shuzi (Northeast Institute of Technology; Shenyang) (Manuscript received 28 March; 1983; revised manuscript 8 October; 1983)
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SUN Shuzi (Northeast Institute of Technology; Shenyang) (Manuscript received 28 March; 1983; revised manuscript 8 October; 1983). TRANSITION FROM CRYSTALLINE Al TO AMORPHOUS Al_2O_3 BY O~+-IMPLANTATION. Acta Metall Sin, 1984, 20(4): 358-361.

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Abstract  TEM was employed to study the transition from crystalline Al to amorphous state Al_2O_3 by O~+-implantation. The structural feature of the thin film specimen appears to be fcc polycrystals between 200 to 600(■) and to refine obviously during O~+ implanting. The refinement may be down to 19-40(■) when the increasing of the dose of O~+-implanted up to 1×10~(17) ion/cm~2. The diffraction pattern becomes the faint diffuse scattering ring, i.e., an enough evidence of the order-disorder transition or the amorphous formation is given. ESCA has identified that the amorphous substance is Al_2O_3.
Received:  18 April 1984     
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