研究论文

柔性、可拉伸变形微型热电器件的设计与集成

  • 刘瑞 ,
  • 于治 ,
  • 赵洋 ,
  • 李晓齐 ,
  • 喻海龙 ,
  • 何娟 ,
  • 聂鹏程 ,
  • 王春雨 ,
  • 邰凯平 ,
  • 刘畅
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  • 1沈阳化工大学 理学院 沈阳 110142
    2中国科学院金属研究所 沈阳材料科学国家研究中心 沈阳 110016
    3辽宁冷芯半导体科技有限公司 辽宁省集成电路热管理专业技术创新中心 沈阳 110172
刘 瑞,女,1996年生,硕士
邰凯平,kptai@imr.ac.cn,主要从事热电材料与器件的研究; 刘 畅,cliu@imr.ac.cn,主要从事碳纳米管的制备、性能与应用探索的研究

收稿日期: 2022-04-17

  修回日期: 2022-06-10

  网络出版日期: 2022-06-22

基金资助

国家自然科学基金项目(52073290);国家自然科学基金项目(51927803);辽宁省杰出青年科学基金项目(2023JH6/100500004);辽宁省自然科学基金项目(2022-MS-011);沈阳市科技计划项目(23-407-3-23)

Design and Integration of Flexible and Stretchable Micro-Thermoelectric Devices

  • LIU Rui ,
  • YU Zhi ,
  • ZHAO Yang ,
  • LI Xiaoqi ,
  • YU Hailong ,
  • HE Juan ,
  • NIE Pengcheng ,
  • WANG Chunyu ,
  • TAI Kaiping ,
  • LIU Chang
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  • 1College of Science, Shenyang University of Chemical Technology, Shenyang 110142, China
    2Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
    3Liaoning Professional Technology Innovation Center for Integrated Circuit Thermal Management, Liaoning Lengxin Semiconductor Technology Co. Ltd., Shenyang 110172, China
TAI Kaiping, professor, Tel: 18640320728, E-mail: kptai@imr.ac.cn; LIU Chang, professor, Tel: 18640219199, E-mail: cliu@imr.ac.cn

Received date: 2022-04-17

  Revised date: 2022-06-10

  Online published: 2022-06-22

Supported by

National Natural Science Foundation of China(52073290);National Natural Science Foundation of China(51927803);Science Fund for Distinguished Young Scholars of Liaoning Province(2023JH6/100500004);Natural Science Foundation of Liaoning Province(2022-MS-011);Shenyang Science and Technology Plan Project(23-407-3-23)

摘要

在能源匮乏、环境污染严重的今天,研发可循环利用、环境友好的新型能源材料与器件具有重要意义。热电材料可直接实现热能与电能的相互转换,为解决这一问题提供了新的途径。特别是,近年来由于柔性热电器件展现出自供电、可穿戴等优势,受到了人们的高度重视。本工作通过引入聚二甲基硅氧烷(polydimethylsiloxane,PDMS)基底,利用单壁碳纳米管(single-wall carbon nanotube,SWCNT)/Bi2Te3热电复合薄膜材料优异的热电性能和柔韧性,设计制作了一种可拉伸变形的三维拱形结构的微型热电发电器件。该器件充分利用薄膜材料面内最佳热电性能方向,通过器件内外温差获得热-电性能转换,在电极两端产生电势差,实现发电。该微型柔性热电器件在温差为4 K时,输出电压为4.8 mV,最大输出功率达2.6 × 10-9 W,功率密度为3.9 × 10-9 W/cm2,器件的最小弯曲半径为3 mm。这种微型柔性热电器件的制备工艺简单易行、成本低廉,为柔性热电薄膜发电器件的研制提供了新途径。

本文引用格式

刘瑞 , 于治 , 赵洋 , 李晓齐 , 喻海龙 , 何娟 , 聂鹏程 , 王春雨 , 邰凯平 , 刘畅 . 柔性、可拉伸变形微型热电器件的设计与集成[J]. 金属学报, 2024 , 60(3) : 348 -356 . DOI: 10.11900/0412.1961.2022.00171

Abstract

A miniature flexible thermoelectric generator with a stretchable three-dimensional (3D) arch structure is designed using polydimethylsiloxane (PDMS) as a substrate and the excellent thermoelectric properties and flexibility of single-wall carbon nanotube (SWCNT)/Bi2Te3 thermoelectric hybrid film. The device fully utilizes optimal in-plane thermoelectric performance direction of the film material and obtains electro-thermal conversion through temperature differences between the inside and outside of the device plane. Therefore, thermoelectric potential is generated at both ends of the electrode to achieve power generation. When the temperature difference was 4 K, the output voltage is 4.8 mV, the maximum output power is 2.6 × 10-9 W, the power density is 3.9 × 10-9 W/cm2, and the minimum bending radius of the device can reach 3 mm. The fabrication process for this miniature flexible thermoelectric device is simple, feasible, and low-cost, providing a new avenue for developing flexible thermoelectric thin-film power generation devices.

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