采用磁控溅射制备Ti_70-xTa₁₅Zr₁₅Fe_x (x=0.3、0.6、1.0，原子分数，%)合金薄膜，通过XRD、TEM、弯曲法和动态热机械分析研究Fe元素含量对合金薄膜组织结构、马氏体相变、力学性能和阻尼特性的影响。结果表明，Ti_70-xTa₁₅Zr₁₅Fe_x (x=0.3、0.6、1.0)合金薄膜在室温下为母相与马氏体相共存，逆马氏体相变开始温度高于100 ℃，具有双程记忆效应。添加Fe元素可以提高薄膜的塑性和强度，延伸率可达到12.8% (x=1.0)。薄膜在升温降温过程中均可观察到较高的弛豫型内耗峰，当Fe含量为1.0%时，弛豫内耗峰最大值可达到0.116。

In recent years, there has been a rapid development in microelectromechanical systems owing to their lightweight and integration with small volume. The microactuater bears low-frequency vibrations during operations, which affects the safety and stability of the device. Ti-Ta-Zr-Fe thin film is a high-temperature shape memory alloy film, which has good shape memory effect and thermal stability. The addition of Fe can improve the plasticity of the film and make it promising to use in high-temperature miniature damping devices. Ti_70-xTa₁₅Zr₁₅Fe_x (x=0.3, 0.6, and 1.0, atomic fraction, %) shape memory thin films were prepared by direct-current magnetron sputtering. The effect of the Fe content on the microstructures, martensitic transformation, mechanical properties, and damping behavior was studied by XRD, TEM, bending test, and dynamic mechanical analysis. It was found that the room-temperature phase composition of the alloy films with different Fe contents were in the parent and martensite phases. The reverse martensitic transformation temperature of the thin films was above 100 ℃, and the films exhibited the two-way shape memory effect. The addition of Fe enhanced the ductility and strength of the film. When the Fe content was 1.0%, the elongation could reach up to 12.8%. During the heating and cooling processes, the relaxation type friction peak was observed. The damping capacity during the relaxation processof the film containing 1.0%Fe could reach up to 0.116.