利用电弧离子镀技术在不锈钢基体上制备了(Ti, Al)N涂层, 研究了N2分压改变对涂层残余应力沿层深分布及相关
力学性能的影响. 结果表明, 低N2分压下, (Ti, Al)N涂层残余应力沿层深分布较均匀, 随N2分压的增加, 涂层应力沿层深呈
“钟罩型”分布, 且全膜厚的应力值也明显增大; 通过对涂层生长结构及微观成分分析, 初步探讨了应力分布机理. 随N2分压的增
加, 涂层硬度会显著增加, 而膜/基结合力则大幅下降; 采用改变N2分压工艺制备(Ti, Al)N涂层, 可有效调整涂层残余应力沿
层深分布趋势, 改善其力学性能, 并可成功制备厚度在130 μm以上的硬质涂层.
The effects of N2 partial pressure on the depth distribution
of residual stresses and mechanical properties in the (Ti, Al)N coatings
prepared by arc ion plating (AIP), were investigated. The results indicate
that the stress distribution was roughly uniform when the coatings were
deposited under lower NN2 partial pressure. As the partial pressure
increased the stress distribution to exhibited a “bell” shape and the
average stresses of coatings increased remarkably. The mechanism of
stress distribution was analyzed by characterizing the microstructure and
the composition of the coating. The N2 partial pressure also affected the
hardness of coatings and the coating/substrate adhesion obviously. The
higher the N2 partial pressure is, the higher the coating hardness but
the lower the adhesion. The stress distribution can be modified and the
adhesion of the coating/substrate can be improved by optimizing N2 partial
pressure parameter. Finally, the coatings with the thickness over 130 μm
were successfully directly deposited on the substrate through optimizing
the N2 partial pressure.
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