XPS数据处理的曲线拟合组合算法及检验

金属学报

1996, Vol. 32

Issue (2): 219-224

论文

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XPS数据处理的曲线拟合组合算法及检验

龚沿东

中国科学院金属研究所

COMBINATION ALGORITHM FOR CURVE FITTING OF XPS DATA AND DETECTION

GONG Yandong(Institute of Metal Research; Chinese Academy of Sciences;Shenyang 110015)(Manuscript received 1995-06-12)

引用本文:

龚沿东. XPS数据处理的曲线拟合组合算法及检验[J]. 金属学报, 1996, 32(2): 219-224.
. COMBINATION ALGORITHM FOR CURVE FITTING OF XPS DATA AND DETECTION[J]. Acta Metall Sin, 1996, 32(2): 219-224.

全文: PDF(364 KB)

摘要: 本文针对ＸＰＳ（Ｘ射线光电子能谱）数据处理中线型选择的问题作出了一个新改进，在曲线拟合过程中应用了一个卷积线型。新算法被称为＂组合算法＂对Ｃｕ标样３ｐ谱和Ｆｅ－Ｍｎ－Ａｌ合金钝化膜Ｏｌｓ谱的拟合表明，它比选择Ｇａｕｓｓ－Ｌｏｒｅｎｔｚ积函数（ＧＬＰ）或Ｇａｕｓｓ－Ｌｏｒｅｎｔｚ和函数（ＧＬＳ）更为准确和有效

关键词 ：ＸＰＳ, ＸＰＳ线型, 组合算法

Abstract：A new line shape was chosen for curve fitting of XPS (X-ray photoelectron spectroscopy) data. In general. the GLP(Gauss-Lorentz product function) orGLS(Gauss-Lorentz sum function) was used as the line shape of XPS, but they are not strict because the true line shape is a convolution of many comments. A convoluted line shape is chosen in fitting procedure. The new algorithm is called ‘combination algorithm' . A detec tion was taken with Cu 3p spectrum and O ls spectra of Fe-Mn-Al alloy. It is shown that the combination algorithm is more effective for the process of XPS data than GLP and GLS.(Correspondent: GONG Yandong, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015)

Key words： XPS line shape of XPS combination algorithm

收稿日期: 1996-02-18

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1SherwoodPMA．PracticalSurfaceAnalysis,2nded．,Chechester:JohnWileyandSons,1990;1:5552SherwoodPMA．PracticalSurfaceAnalysisbyAugerandX-ray,photoelectronSpectroscopy,Chechester:JohnWileyandSons,1983:4453ShirleyDA．PhysRev,1972;B5:4709

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