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多组分缓冲层W梯度掺杂DLC复合薄膜研究 |
杨义勇;彭志坚;付志强;邬苏东;陈新春;王成彪 |
中国地质大学(北京)工程技术学院; 北京 100083 |
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STUDY ON W GRADED DOPING DLC COMPOSITE FILMS WITH MULTICOMPONENT TRANSITION LAYER |
YANG Yiyong; PENG Zhijian; FU Zhiqiang; WU Sudong; CHEN Xinchun; WANG Chengbiao |
School of Engineering and Technology; China University of Geosciences; Beijing 100083 |
引用本文:
杨义勇 彭志坚 付志强 邬苏东 陈新春 王成彪. 多组分缓冲层W梯度掺杂DLC复合薄膜研究[J]. 金属学报, 2010, 46(1): 34-40.
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STUDY ON W GRADED DOPING DLC COMPOSITE FILMS WITH MULTICOMPONENT TRANSITION LAYER[J]. Acta Metall Sin, 2010, 46(1): 34-40.
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