金属学报  1984, Vol. 20 Issue (2): 182-187

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Ag-Pd合金表面的择优溅射

董树忠;庞嬿婉;邓景发;朱效中

复旦大学;复旦大学;复旦大学;复旦大学

PREFERENTIAL SPUTTERING ON THE SURFACE OF Ag-Pd ALLOY

by DONG Shuzhong; PANG Yanwan; DENG Jingfa; ZHU Xiaozhong(Fudan University; Shanghai)(Manuscript received 29 November; 1982; revised manuscript 9 May; 1983)

董树忠;庞嬿婉;邓景发;朱效中. Ag-Pd合金表面的择优溅射[J]. 金属学报, 1984, 20(2): 182-187.
, , , . PREFERENTIAL SPUTTERING ON THE SURFACE OF Ag-Pd ALLOY[J]. Acta Metall Sin, 1984, 20(2): 182-187.

摘要 参考文献 相关文章 Metrics 全文: PDF(504 KB)   摘要: 用XPS方法研究了Ag-Pd合金在氩离子轰击下表面组成的变化。结果表明,由于Ag-Pd表面原子间结合能不同,合金在热退火后表面富Ag,经氩离子轰击后表面富Pd。将合金表面的Ag-Pd溅射产额比与相应的文献结果作了比较。在本文的实验条件下,合金组分间的相对溅射产额随合金成分变化,与氩离子轰击合金形成表面无序层有关。含Pd量为0.32at.-％的稀Pd合金的溅射结果表明,其组分的溅射产额比与含Pd量较多时的结果有明显差别。 Abstract：Changes in the surface composition of Ag-Pd alloy under argon ion bombardment have been monitored by XPS. It is shown that the surface of the alloy isrich in Ag after annealing and is rich in Pd after ion bombardment due to their different surface binding energy. The component sputtering yield ratio S_(Ag)/S_(Pd) is obtained using Shimizu model. The experiment and its results are compared with that obtained by the other researchers. It is found that the yield ratio varies with the alloy composition, and is related to the disorder surface layer formed by argon ion bombardment. The yield ratio S_(Ag)/S_(Pd) of the Pd dilute alloy (X_(Pd)=0.32 at.-%) is much larger than that of the others. 收稿日期: 1984-02-18      服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 董树忠 庞嬿婉 邓景发 朱效中 44.8K 链接本文: https://www.ams.org.cn/CN/      或      https://www.ams.org.cn/CN/Y1984/V20/I2/182 1 Sigmund, F., Sputtering by Particle Bombardment I, Ed. Behrisch, R., Sprlnger-Verlag, Berlin, 1981, p. 60． 2 Coburn, J. W., J. Vac. Sci. Technol., 13(1976) , 1037． 3 Braun, P.; Farber, W., Surf. Sci., 47(1975) , 57． 4 Okutani, T.; Shikata, M.; Shimizu, R., Surf. Sci., 99(1980) , 1410． 5 Frankenthal, R. P.; Siconolfi, D. L., ibid., 104(1981) , 205． 6 Zalar, A., Proc. of the 4th Int. Conf. on Solid Surface and the 3rd Europ. Conf. on Surface Science, Eds. Degras, D. A.; Costa, M., Supplement a la Revue, "Le Vide, les Couches Minces" n°201, 1980, p. 1311． 7 Mathieu, H. I.; Landolt, D., Surf. Sci., 53 (1975) , 228． 8 Garbassi, F.; Parravano, G., ibid., 71 (1978) , 42． 9 Slusser, G. I.; Winnograd, N., ibid., 84(1979) , 211． 10 Betz, G. Opitz, M.; Braun, P., Nucl. Instrum. Methods, 182/183(1981) , 63． 11 Mathieu, H. J.; Landolt, D., Proc. of the 4th Int. Conf. on Solid Surface and the 3rd Europ. Conf. on Surface Science, Eds. Degras, D. A.; Costa, M., Supplement a la Revue, "Le Vide, les Couches Minces" n°201, 1980, p. 1319． 12 Kuijers, F. J.; Pones, V., J. Catal., 60 (1979) , 100． 13 Shimizu, M.; Ono, M.; Nakayama, K., Surf. Sci., 36(1973) , 817． 14 West, L. A., J. Vac. Sci. Technol., 13(1976) , 198． 15 Oechsner, H., Z. Phys., 238(1970) , 433． 16 Penn, D. R., J. Electron Spectrosc. Relat. Phenom., 9(1976) , 29． 17 Oechsner, H., Z. Phys., 261 (1973) , 37． 18 Wood, B. J.; Wise, H., Surf. Sci., 52(1975) , 151． 19 Nagel, S. R.; Fisher, G. B.; Tauc, J.; Bagley, B. G., Phys. Rev., B13 (1976) , 3284． 20 Kelly, R., Surf. Sci., 100 (1980) , 85．b No related articles found! Viewed Full text Abstract Cited   Shared      Discussed